Acta Photonica Sinica, Volume. 50, Issue 11, 1131001(2021)
Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure
Figures & Tables(8)
Fig. 1. GIXRR measured and fitting curves of Yb/Al multilayer prepared under different base pressure conditions
Fig. 2. Average interfacial widths of Yb and Al under different base pressure
Fig. 3. AFM images of Yb/Al multilayer from 2×10-4 Pa to 4×10-5 Pa，and RMS roughness of Yb/Al multilayer surface
Fig. 5. XRD diffraction spectrum of Yb/Al multilayers prepared under different base pressures
Fig. 6. The stress of Yb/Al multilayers as a function of the base pressure
Table 1. Structural parameters of Yb/Al multilayers prepared under different base pressure
View tableView in ArticleTable 1. Structural parameters of Yb/Al multilayers prepared under different base pressure
Sample Material Thickness/nm Interface width/nm 4×10-4 Pa a-SiC* 15.05 1.70 Yb 18.45 2.01 Al 45.33 2.23 2×10-4 Pa a-SiC 15.18 1.59 Yb 18.20 1.96 Al 45.31 2.23 1×10-4 Pa a-SiC 15.07 1.46 Yb 18.21 1.84 Al 45.40 2.16 8×10-5 Pa a-SiC 15.17 1.28 Yb 18.13 1.75 Al 45.20 2.07 4×10-5 Pa a-SiC 15.27 1.46 Yb 18.29 1.65 Al 45.40 1.99
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Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001
Paper Information
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Received: Apr. 14, 2021
Accepted: Jun. 7, 2021
Published Online: Dec. 2, 2021
The Author Email: QI Runze (qrz@tongji.edu.cn), XIN Zihua (zhxin@shu.edu.cn)
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