Acta Photonica Sinica, Volume. 50, Issue 11, 1131001(2021)
Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure
In order to study the effect of base pressure on the microstructure and optical properties of Yb/Al multilayers, a series of SiC/(Yb/Al)3 period multilayers with the same structure were prepared by DC magnetron sputtering under base pressure conditions of 4×10-5 Pa, 8×10-5 Pa, 1×10-4 Pa, 2×10-4 Pa and 4×10-4 Pa, respectively. The surface and internal structures of Yb/Al multilayers were characterized by X-ray grazing incident reflection, atomic force microscopy and wide-angle X-ray diffraction. The results show that the average interface width of Yb/Al multilayers decreases from 2.15 nm to 1.82 nm with the raise of base pressure from 4×10-4 Pa to 4×10-5 Pa; the surface roughness decreases from 1.87 nm to 1.43 nm. Yb, Yb2O3and Al polycrystalline grains are formed in the film, and the grain size increases slightly. The stress of SiC/(Yb/Al)3 period multilayer is tensile, and the stress increases from 85 MPa to 142 MPa with the base pressure raising from 4×10-4 Pa to 4×10-5 Pa. The reflectivity of the sample prepared under 4×10-5 Pa base pressure was measured. When the wavelength is 73.6 nm and the incident angle is 5°, the reflectivity of the sample is 31.3%.
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Liangsheng XIAO, Runze QI, Bo LAI, Qiushi HUANG, Jiali WU, Yue YU, Zihua XIN. Study on the Structure and Reflectivity of Yb/Al Multilayers Prepared by Different Base Pressure[J]. Acta Photonica Sinica, 2021, 50(11): 1131001
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Received: Apr. 14, 2021
Accepted: Jun. 7, 2021
Published Online: Dec. 2, 2021
The Author Email: QI Runze (qrz@tongji.edu.cn), XIN Zihua (zhxin@shu.edu.cn)