Fractal surface of TiN thin films sputtered at different N<SUB>2</SUB> flow ratios

Chinese Journal of Quantum Electronics, Volume. 25, Issue 3, 346(2008)

Fractal surface of TiN thin films sputtered at different N₂ flow ratios

Xiang-dong LUO^*

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LUO Xiang-dong. Fractal surface of TiN thin films sputtered at different N₂ flow ratios[J]. Chinese Journal of Quantum Electronics, 2008, 25(3): 346

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Received: Nov. 19, 2007

Accepted: --

Published Online: Jun. 7, 2010

The Author Email: Xiang-dong LUO (lxd7973@163.com)

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