Acta Optica Sinica, Volume. 30, Issue 10, 2923(2010)
A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer
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Liu Ke, Li Yanqiu. A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923
Category: Instrumentation, Measurement and Metrology
Received: Nov. 24, 2009
Accepted: --
Published Online: Oct. 24, 2012
The Author Email: Ke Liu (liukess2008@gmail.com)