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Acta Optica Sinica, Volume. 30, Issue 10, 2923(2010)

A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer

Liu Ke* and Li Yanqiu
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    Article index updated:May. 20, 2024

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    Liu Ke, Li Yanqiu. A New Calibration Method of Systematic Errors in Phase-Shifting Point Diffraction Interferometer[J]. Acta Optica Sinica, 2010, 30(10): 2923

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 24, 2009

    Accepted: --

    Published Online: Oct. 24, 2012

    The Author Email: Ke Liu (liukess2008@gmail.com)

    DOI:10.3788/aos20103010.2923

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology