Optics and Precision Engineering, Volume. 18, Issue 8, 1822(2010)
Flow behavior of resist in room-temperature micro-imprinting and its process optimization
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WEI Zheng-ying, XIONG Xiao-dong, DU Jun, DING Yu-cheng. Flow behavior of resist in room-temperature micro-imprinting and its process optimization[J]. Optics and Precision Engineering, 2010, 18(8): 1822
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Received: Nov. 20, 2009
Accepted: --
Published Online: Dec. 7, 2010
The Author Email: Zheng-ying WEI (zywei@mail.xjtu.edu.cn)
CSTR:32186.14.
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