Acta Optica Sinica, Volume. 23, Issue 8, 1005(2003)
Projection Type Micro-Optical Encoder Based on MEMS Technology
References(3)
[1] [1] Pattigrew R M. Analysys of grating imaging and its application to displacement metrogy. Proc. SPIE, 1977, 136:325～332
[3] [3] Hane K, Grover C P. Imaging with rectangular transmission grating. J. Opt. Soc. Am. (A), 1987, 4(4):706～711
[4] [4] Hane K, Grover C P. Magnified grating images used in displacement sensing.Appl. Opt., 1987, 26(14):2355～2359
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[in Chinese], [in Chinese], [in Chinese]. Projection Type Micro-Optical Encoder Based on MEMS Technology[J]. Acta Optica Sinica, 2003, 23(8): 1005
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