Projection Type Micro-Optical Encoder Based on MEMS Technology

Acta Optica Sinica, Volume. 23, Issue 8, 1005(2003)

[in Chinese]^1、*, [in Chinese]², and [in Chinese]²

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[in Chinese], [in Chinese], [in Chinese]. Projection Type Micro-Optical Encoder Based on MEMS Technology[J]. Acta Optica Sinica, 2003, 23(8): 1005

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Paper Information

Category: Optical Devices

Received: May. 28, 2002

Accepted: --

Published Online: Jun. 27, 2006

The Author Email: (ygli@sjtu.edu.cn)

DOI:

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