Optics and Precision Engineering, Volume. 32, Issue 6, 833(2024)
Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage
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Wenwen WANG, Leijie LAI, Pengzhi LI, Limin ZHU. Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage[J]. Optics and Precision Engineering, 2024, 32(6): 833
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Received: Nov. 12, 2023
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Published Online: Apr. 19, 2024
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