Fig. 1. Block diagram of a data-driven feedforward-feedback control loop

Fig. 2. Flow chart of resonant frequency extraction algorithm

Fig. 3. Micro/nanopositioning stage experimental system

Fig. 4. Overall block diagram of the composite control circuit of the positioning system

Fig. 5. Comparison of tracking results between different controllers

Fig. 6. Convergence effect of tracking error with different learning rates

Fig. 7. Different reference trajectory tracking effects

Fig. 8. Comparison of non-periodic signal tracking results between different controllers