[1] [1] D. Dudley, W. Duncan, J. Slaughter. Emerging digital micromirror device (DMD) applications [C]. SPIE, 2003, 4985: 14～25

[2] [2] P. D. Dobbelaere, K. Falta, L. Fan et al.. Digital MEMS for optical switching [J]. IEEE Communications Magazine, 2002, 40(3): 88～95

[3] [3] D. Hah, S. Huang, H. Nguyen et al.. Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators [J]. J. Microelectromechanical Systems, 2004, 13(2): 279～289

[4] [4] C. Winter, L. Fabre, F. Lo Conte et al.. Micro-beamer based on MEMS micro-mirrors and laser light source [J]. Procedia Chemistry, 2009, 1(1): 1311～1314

[5] [5] J. Tauscher, W. O. Davis, D. Brown et al.. Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics [C]. SPIE, 2010, 7594: 75940A

[6] [6] A. D. Yalcinkaya, O. Ergeneman, H. Urey. Polymer magnetic scanners for bar code applications [J]. Sens. Actuators A: Phys., 2007, 135(1): 236～243

[7] [7] C. Chong, K.Isamoto, H. Toshiyoshi. Optically modulated MEMS scanning endoscope [J]. IEEE Photon. Technol. Lett., 2006, 18(1): 133～135

[8] [8] H. K. Xie, J. J. Sun, S. G. Guo et al.. 3D endoscopic optical coherence tomography based on rapid-scanning MEMS mirrors [J]. Opt. Express, 2009, 18(12): 12065～12075

[9] [9] Yan Bin, Yuan Weizheng, Qiao Dayong et al.. Study on resonant frequency for a noval MEMS micro scanning mirror [J]. Acta Optica Sinica, 2012, 32(6): 0623004

[10] [10] Yan Bin, Yuan Weizheng, Qiao Dayong et al.. Novel resonant micro-opto-electro-mechanical scanning mirror and Lissajous pattern dispaly [J]. Acta Optica Sinica, 2012, 32(5): 0523003