Acta Optica Sinica, Volume. 33, Issue 6, 623001(2013)
Design and Modes of a Novel Two-Dimensional Microscanner with Electrostatic Actuation
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Liu Yaobo, Yuan Weizheng, Qiao Dayong, Yang Xuan, Liang Xiaowei, Lian Bin. Design and Modes of a Novel Two-Dimensional Microscanner with Electrostatic Actuation[J]. Acta Optica Sinica, 2013, 33(6): 623001
Paper Information
Category: Optical Devices
Received: Jan. 24, 2013
Accepted: --
Published Online: May. 22, 2013
The Author Email: Yaobo Liu (liuyaobo2000@163.com)
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