Optics and Precision Engineering, Volume. 31, Issue 7, 975(2023)

Differential confocal radius of curvature measurement method for five-dimensional position monitoring

Yuqing ZHUANG... Guangwei ZHANG, Weiqian ZHAO, Jiang CUI and Yun WANG* |Show fewer author(s)
Author Affiliations
  • MIIT Key Laboratory of Complex-field Intelligent Exploration, Beijing Institute of Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing100081, China
  • show less
    References(18)

    [1] T P JOHNSON, D G CROWE. Optical design and intensity interferometry simulations in support of the Kilometer Space Telescope. Applied Optics, 60, 3464-3473(2021).

    [2] D F ZHANG, X L LI, D W RUI et al. Key technology progress of optomechanical systems in 193 nm projection objective. Scientia Sinica Technologica, 47, 565-581(2017).

    [3] [3] 3杨李茗, 叶海仙. 大口径大曲率半径光学元件的高精度检测[J]. 光学 精密工程, 2011, 19(6): 1207-1212. doi: 10.3788/ope.20111906.1207YANGL M, YEH X. High-precision metrology for optical components with large-apertures and large radii of curvature[J]. Opt. Precision Eng., 2011, 19(6): 1207-1212. (in Chinese). doi: 10.3788/ope.20111906.1207

    [4] [4] 4邱丽荣, 李佳, 赵维谦, 等. 激光共焦透镜曲率半径测量系统[J]. 光学 精密工程, 2013, 21(2): 246-252. doi: 10.3788/ope.20132102.0246QIUL R, LIJ, ZHAOW Q, et al. Laser confocal measurement system for curvature radii of lenses[J]. Opt. Precision Eng., 2013, 21(2): 246-252. (in Chinese). doi: 10.3788/ope.20132102.0246

    [5] [5] 5卜乙禄, 李琦, 李彦宏, 等. 激光差动共焦反射式超大曲率半径测量系统研制[J]. 电子测量与仪器学报, 2020, 34(5): 1-8. doi: 10.13382/j.jemi.B2002964BUY L, LIQ, LIY H, et al. Development of laser reflection differential confocal ultra-large radius measurement system[J]. Journal of Electronic Measurement and Instrumentation, 2020, 34(5): 1-8. (in Chinese). doi: 10.13382/j.jemi.B2002964

    [6] S V Y MONTIEL, C J C BELLO. Optical spherometer for measuring large curvature radii of convex surfaces, 10375, 254-264(10375).

    [7] [7] 7徐瑞, 赵劲松, 岳清, 等. 基于三坐标测量机的大口径红外光学透镜曲率半径测量方法研究[J]. 红外技术, 2018, 40(4): 338-345.XUR, ZHAOJ S, YUEQ, et al. Measurement of curvature radius of large diameter aperture infrared optical lens based on CMM[J]. Infrared Technology, 2018, 40(4): 338-345. (in Chinese)

    [8] [8] 8李建民. 用自准直原理测大曲率半径调焦误差及讨论[J]. 计量技术, 2004(11): 25-27. doi: 10.3901/jme.2003.03.151LIJ M. Discussion on measuring focusing error of large curvature radius with self-collimation principle[J]. Measurement Technique, 2004(11): 25-27. (in Chinese). doi: 10.3901/jme.2003.03.151

    [9] J KREDBA, P PSOTA, M STAŠÍK et al. Absolute interferometry for fast and precise radius measurement. Optics Express, 29, 12531-12542(2021).

    [10] Q Y WU, Q S HUANG, J YU et al. Simulation and measurement of systematic errors of stitching interferometry for high precision X-ray mirrors with large radius of curvature. Applied Optics, 60, 8694-8705(2021).

    [11] J P CUI, Z G LI, Z J BAO et al. Radius measurement of large aperture long-focal-length lens using computer-generated hologram, 11927, 119270E(2021).

    [12] Z M YANG, K L WANG, J L CHENG et al. Large radius of curvature measurement based on virtual quadratic Newton rings phase-shifting moiré-fringes measurement method in a nonnull interferometer. Applied Optics, 55, 4769-4775(2016).

    [13] S TANG, Y H LI, L R QIU et al. High-precision laser transverse differential confocal radius measurement method. Optics Express, 29, 29960-29971(2021).

    [14] [14] 14李彦宏, 杨帅, 唐顺, 等. 后置分光瞳激光差动共焦曲率半径测量[J]. 光学 精密工程, 2021, 29(10): 2287-2295. doi: 10.37188/OPE.20212910.2287LIY H, YANGSH, TANGSH, et al. Detecting divided aperture laser differential confocal radius measurement[J]. Opt. Precision Eng., 2021, 29(10): 2287-2295. (in Chinese). doi: 10.37188/OPE.20212910.2287

    [15] J J LI, L TANG, Q LI et al. Laser transverse dual differential confocal radius measurement with high efficiency and high precision. Optics Express, 30, 24481-24496(2022).

    [16] [16] 16孙若端, 邱丽荣, 杨佳苗, 等. 激光差动共焦曲率半径测量系统的研制[J]. 仪器仪表学报, 2011, 32(12): 2833-2838.SUNR D, QIUL R, YANGJ M, et al. Development of laser differential confocal radius measurement system[J]. Chinese Journal of Scientific Instrument, 2011, 32(12): 2833-2838. (in Chinese)

    [17] X H WANG, S TANG, W Q ZHAO et al. Laser confocal auto-collimation decentration measurement for spherical lens. Measurement Science and Technology, 31, 105002(2020).

    [18] [18] 18占伟伟, 卢海燕, 王秀, 等. 基于灰度加权重心法的线阵CCD亚像素细分定位实验研究[J]. 光学技术, 2018, 44(4): 476-479.ZHANW W, LUH Y, WANGX, et al. Experimental study on sub-pixel subdivision location of linear CCD based on gray weighted centroid algorithm[J]. Optical Technique, 2018, 44(4): 476-479. (in Chinese)

    Tools

    Get Citation

    Copy Citation Text

    Yuqing ZHUANG, Guangwei ZHANG, Weiqian ZHAO, Jiang CUI, Yun WANG. Differential confocal radius of curvature measurement method for five-dimensional position monitoring[J]. Optics and Precision Engineering, 2023, 31(7): 975

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Modern Applied Optics

    Received: Nov. 10, 2022

    Accepted: --

    Published Online: Apr. 28, 2023

    The Author Email: WANG Yun (alotrabbits@163.com)

    DOI:10.37188/OPE.20233107.0975

    Topics