Fig. 1. Differential confocal radius measurement principle for five-dimensional position monitoring adjustment

Fig. 2. Schematic diagram of spherical center deviated from measurement optical axis

Fig. 3. Five-dimensional adjustment system

Fig. 4. Two-dimensional pan and tilt adjustment system

Fig. 5. Radius of curvature measurement system based on five-dimensional adjustment

Fig. 6. Comparison of repeated measurements of radius of curvature