Optics and Precision Engineering, Volume. 26, Issue 12, 2873(2018)

Reflective shearing point diffraction interferometer for phase defect measurement

MA Yun1... CHEN Lei2, LIU Yi-ming2 and ZHU Wen-hua2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(17)

    [1] [1] ARIMA K, SHIGETOSHI T, INOUE H, et al.. Nano-scale characterization of surface defects on CMP-finished Si wafers by scanning probe microscopy combined with laser light scattering[C]. Proc. MRS, 2007, 991: 227-232.

    [3] [3] LIU Y, XU W D, ZHAO CH Q, et al.. A detecting system of sapphire internal defects based on laser light scattering tomography[J]. Chinese Journal of Lasers, 2014, 41(9): 38-42. (in Chinese)

    [5] [5] LUO M, BU Y. XU J, et al.. Optical element surface defect measurement based on multispectral technique[J]. Chinese Journal of Lasers, 2017, 9(1): 198-207. (in Chinese)

    [6] [6] MATTHEWS M J, BASS I L, GUSS G M, et al.. Downstream intensification effects associated with CO2 laser mitigation of fused silica[J]. SPIE, 2007, 6720: 67200A.

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    [8] [8] YAMANE T, TANAKA T, TERASAWA T, et al.. Phase defect analysis with actinic full-field EUVL mask blank inspection[J]. SPIE, 2011, 8166, 81660G.

    [9] [9] OGAWA K, WATAKABE Y. Phase defect inspection by differential interference[J]. SPIE, 2001, 4409: 543-554.

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    [11] [11] HAMAMOTO K, TANAKA Y, HOSOKAWA N, et al.. Phase defect observation using an EUV microscope[J]. SPIE, 2006, 6151: 361-367.

    [12] [12] RAVIZZA F L. Imaging of Phase Objects Using Partially Coherent Illumination[D]. Livermore: Lawrence Livermore National Laboratory (LLNL), 2013.

    [13] [13] SOMMARGREN G E, PHILLION D W, JOHNSON M A, et al.. 100-picometer interferometry for EUVL[J]. SPIE, 2002, 4688: 316-328.

    [15] [15] SERVIN M, QUIROGA J A, PADILLA J M. Fringe Pattern Analysis for Optical Metrology: Theory, Algorithms, and Applications[M]. Wiley-VCH, 2014: 164-169.

    [16] [16] GOODMAN J W. Introduction to Fourier Optics[M]. QIN K CH, Transl.. Beijing: Publishing House of Electronics Industry, 2011: 40-43. (in Chinese)

    [17] [17] MACY W W. Two-dimensional fringe-pattern analysis[J]. Applied Optics, 1983: 3898-3901.

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    MA Yun, CHEN Lei, LIU Yi-ming, ZHU Wen-hua. Reflective shearing point diffraction interferometer for phase defect measurement[J]. Optics and Precision Engineering, 2018, 26(12): 2873

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    Paper Information

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    Received: Jun. 28, 2018

    Accepted: --

    Published Online: Jan. 27, 2019

    The Author Email:

    DOI:10.3788/ope.20182612.2873

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