Optics and Precision Engineering, Volume. 26, Issue 12, 2873(2018)
Reflective shearing point diffraction interferometer for phase defect measurement
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MA Yun, CHEN Lei, LIU Yi-ming, ZHU Wen-hua. Reflective shearing point diffraction interferometer for phase defect measurement[J]. Optics and Precision Engineering, 2018, 26(12): 2873
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Received: Jun. 28, 2018
Accepted: --
Published Online: Jan. 27, 2019
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