[1] [1] ARIMA K, SHIGETOSHI T, INOUE H, et al.. Nano-scale characterization of surface defects on CMP-finished Si wafers by scanning probe microscopy combined with laser light scattering［C］. Proc. MRS, 2007, 991: 227-232.

[2] [2] DONG M L, LI B, ZHANG F, et al.. Detection of periodic microstructure defect based on optical Fourier transform［J］. Opt. Precision Eng., 2017, 25(7): 1727-1737. (in Chinese)

[3] [3] LIU Y, XU W D, ZHAO CH Q, et al.. A detecting system of sapphire internal defects based on laser light scattering tomography［J］. Chinese Journal of Lasers, 2014, 41(9): 38-42. (in Chinese)

[4] [4] LI Y H, ZHAO Y J, FENG L CH, et al.. Measurement of defect depth by infrared thermal wave nondestructive evaluation based on pulsed phase［J］. Opt. Precision Eng., 2008, 16(1): 55-58. (in Chinese)

[5] [5] LUO M, BU Y. XU J, et al.. Optical element surface defect measurement based on multispectral technique［J］. Chinese Journal of Lasers, 2017, 9(1): 198-207. (in Chinese)

[6] [6] MATTHEWS M J, BASS I L, GUSS G M, et al.. Downstream intensification effects associated with CO2 laser mitigation of fused silica［J］. SPIE, 2007, 6720: 67200A.

[7] [7] BERCEGOL H, BOUCHUT P R, LAMAIGNERE L, et al.. The impact of laser damage on the lifetime of optical components in fusion lasers［J］. SPIE, 2004, 5273: 312- 324.

[8] [8] YAMANE T, TANAKA T, TERASAWA T, et al.. Phase defect analysis with actinic full-field EUVL mask blank inspection［J］. SPIE, 2011, 8166, 81660G.

[9] [9] OGAWA K, WATAKABE Y. Phase defect inspection by differential interference［J］. SPIE, 2001, 4409: 543-554.

[10] [10] LV X K, TAO CH K. Phase disfigurement for transparent material［J］. Nondestructive Testing, 2004, 26(11): 552- 553. (in Chinese)

[11] [11] HAMAMOTO K, TANAKA Y, HOSOKAWA N, et al.. Phase defect observation using an EUV microscope［J］. SPIE, 2006, 6151: 361-367.

[12] [12] RAVIZZA F L. Imaging of Phase Objects Using Partially Coherent Illumination［D］. Livermore: Lawrence Livermore National Laboratory (LLNL), 2013.

[13] [13] SOMMARGREN G E, PHILLION D W, JOHNSON M A, et al.. 100-picometer interferometry for EUVL［J］. SPIE, 2002, 4688: 316-328.

[14] [14] LI Y, YANG Y Y, WANG CH, et al.. Point diffraction interference detection technology［J］. Chinese Optics, 2017, 10(4): 391-414.(in Chinese)

[15] [15] SERVIN M, QUIROGA J A, PADILLA J M. Fringe Pattern Analysis for Optical Metrology: Theory, Algorithms, and Applications［M］. Wiley-VCH, 2014: 164-169.

[16] [16] GOODMAN J W. Introduction to Fourier Optics［M］. QIN K CH, Transl.. Beijing: Publishing House of Electronics Industry, 2011: 40-43. (in Chinese)

[17] [17] MACY W W. Two-dimensional fringe-pattern analysis［J］. Applied Optics, 1983: 3898-3901.