Optics and Precision Engineering, Volume. 26, Issue 12, 2873(2018)
Reflective shearing point diffraction interferometer for phase defect measurement
Figures & Tables(0)
Tools
Get Citation
Copy Citation Text
MA Yun, CHEN Lei, LIU Yi-ming, ZHU Wen-hua. Reflective shearing point diffraction interferometer for phase defect measurement[J]. Optics and Precision Engineering, 2018, 26(12): 2873
Paper Information
Category:
Received: Jun. 28, 2018
Accepted: --
Published Online: Jan. 27, 2019
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20