Acta Photonica Sinica, Volume. 46, Issue 1, 123001(2017)
Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography
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LU Sen, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, HU Chu-xiong. Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography[J]. Acta Photonica Sinica, 2017, 46(1): 123001
Paper Information
Received: Jul. 14, 2016
Accepted: --
Published Online: Feb. 9, 2017
The Author Email: Sen LU (lus13@mails.tsinghua.edu.cn)
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