Acta Photonica Sinica, Volume. 46, Issue 1, 123001(2017)
Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography
The intensity of a fixed point in the interference fringes is closely related to the phase change of interference fringes. According to this principle, a real-time phase locking system was established by the analysis of the intensity field. The intensity voltage of a fixed point in the interference fringes was detected as a feedback signal by a photodetector, and an acoustic optical modulator was used to shift the frenquency of the Gaussian beam in real time. By setting intensity voltage to a fixed value, phase locking function was realized. Theoretical model of fringe phase locking system was derivated and verified by experiment. A phase locking controller was also designed based on the model. The experiment results illustrate that, the phase drift is within ±0.04 period under the 400 Hz control frequency, which satisfies the exposure requirements of interference lithography.
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LU Sen, YANG Kai-ming, ZHU Yu, ZHANG Ming, WANG Lei-jie, HU Chu-xiong. Analysis and Controller Design of Fringe Phase Locking System for Interference Lithography[J]. Acta Photonica Sinica, 2017, 46(1): 123001
Received: Jul. 14, 2016
Accepted: --
Published Online: Feb. 9, 2017
The Author Email: Sen LU (lus13@mails.tsinghua.edu.cn)