Optics and Precision Engineering, Volume. 31, Issue 13, 1890(2023)

Bump height measurement of chip packaging based on white light triangulation

Xianjin LIN... Zuwei WU, Ruiqian YE and Lei WANG* |Show fewer author(s)
Author Affiliations
  • School of Aerospace Engineering, Xiamen University, Xiamen361102, China
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    Figures & Tables(17)
    Schematic diagram of Bump measurement model
    Measurement system of chip package bump height based on white light triangulation
    Example of scanning process for chip samples
    Imaging effect under different exposure time
    Flow chart of bump height measurement algorithm
    Example of complex background of light stripe image ((a) (b) (c) (d): there is no metal wiring on the bottom surface; (e) (f): metal wiring on the bottom)
    U-Net model and optimized structural parameters
    Complete extraction process of light stripe center
    Relationship of grayscale area with distance between grayscale gravity and stripe center
    Regional repeatability distribution under non overexposure and overexposure
    Height measurement error of Bumps (overexposure)
    Bump with large measurement error (the second light spot)
    Examples of complex backgrounds for chip samples
    • Table 1. Linear fitting coefficient of 5 positions (Take a calibration experiment as an example)

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      Table 1. Linear fitting coefficient of 5 positions (Take a calibration experiment as an example)

      位置

      (±100 pixel)

      y=ax+b
      abR2
      3360.3390.2321.000
      1 5360.3390.3111.000
      2 7360.3390.2901.000
      3 9360.3390.2381.000
      5 1360.3390.1951.000
      平 均0.3390.2531.000
    • Table 2. Effect of scanning step on repeatability and accuracy (overexposure state)

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      Table 2. Effect of scanning step on repeatability and accuracy (overexposure state)

      扫描步距/μm区域重复性/μm准确性/μm
      平均值标准差平均值标准差
      10.210.095-0.040.408
      30.260.097-0.030.411
      50.360.133-0.030.414
      70.410.152-0.030.424
      90.480.184-0.050.406
      100.974.770-0.070.413
      110.954.766-0.110.405
      127.2517.661-1.453.653
    • Table 3. Repeatability measurement results of chip samples with different types and sizes

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      Table 3. Repeatability measurement results of chip samples with different types and sizes

      区域编号金属布线高度级别/μm平均极差/μm最大极差/μm
      1450.110.17
      2550.070.13
      3600.120.18
      4600.080.16
      5600.110.16
      6600.120.18
      7600.100.14
      8600.070.17
      91200.160.38
      101200.110.26
    • Table 4. Comparison experiment of different algorithms

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      Table 4. Comparison experiment of different algorithms

      算法组合区域重复性/μm准确性/μm
      平均值标准差平均值标准差
      U-Net分割+函数拟合0.210.095-0.040.408
      U-Net分割0.730.271-2.591.736
      Otsu分割0.580.226-2.121.942
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    Xianjin LIN, Zuwei WU, Ruiqian YE, Lei WANG. Bump height measurement of chip packaging based on white light triangulation[J]. Optics and Precision Engineering, 2023, 31(13): 1890

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    Paper Information

    Category: Modern Applied Optics

    Received: Nov. 2, 2022

    Accepted: --

    Published Online: Jul. 26, 2023

    The Author Email: WANG Lei (wanglei33@xmu.edu.cn)

    DOI:10.37188/OPE.20233113.1890

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