Optics and Precision Engineering, Volume. 31, Issue 13, 1890(2023)
Bump height measurement of chip packaging based on white light triangulation
Fig. 2. Measurement system of chip package bump height based on white light triangulation
Fig. 6. Example of complex background of light stripe image ((a) (b) (c) (d): there is no metal wiring on the bottom surface; (e) (f): metal wiring on the bottom)
Fig. 9. Relationship of grayscale area with distance between grayscale gravity and stripe center
Fig. 10. Regional repeatability distribution under non overexposure and overexposure
Fig. 12. Bump with large measurement error (the second light spot)
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Xianjin LIN, Zuwei WU, Ruiqian YE, Lei WANG. Bump height measurement of chip packaging based on white light triangulation[J]. Optics and Precision Engineering, 2023, 31(13): 1890
Category: Modern Applied Optics
Received: Nov. 2, 2022
Accepted: --
Published Online: Jul. 26, 2023
The Author Email: WANG Lei (wanglei33@xmu.edu.cn)