Infrared and Laser Engineering, Volume. 51, Issue 12, 20220205(2022)
Signal processing method for measuring the radial motion error of rotary axis by interferometry
[1] Ibaraki Soichi, Knapp Wolfgang. Indirect measurement of volumetric accuracy for three-axis and five-axis machine tools: A review. International Journal of Automation Technology, 6, 110-124(2012).
[2] J Yang, Q Feng, J Li. Review on multi-degree-of-freedom motion error measurement methods for rotary-axis laser. Laser & Optoelectronics Progress, 53, 090003(2016).
[3] Z Lou, X Hao, L Liu, et al. spindle radial motion error measurement using a circular grating and a autocollimator. Optics and Precision ngineering, 27, 2053-2061(2019).
[4] [4] Huang B. Research on the spindle radial motion err of the numerical machine tools based on laser displacement sens[D]. Hangzhou: Zhejiang University, 2008. (in Chinese)
[5] [5] Sun C. Research on multidegreeoffreedom measurement method f precision engineering[D]. Changchun: University of Chinese Academy of Sciences (Changchun Institute of Optics), 2021. (in Chinese)
[6] Y Lv, Q Feng, L Liu, et al. Six-degree-of-freedom measurement method based on multiple collimated beams. Infrared and laser Engineering, 43, 3597-3602(2014).
[7] R Liang, W Li, Z Wang, et al. A method to decouple the geometric errors for rotary axis in a five-axis CNC machine. Measurement Science and Technology, 31, 085007(2020).
[8] Q Li, W Wang, J Zhang, et al. All position-dependent geometric error identification for rotary axes of five-axis machine tool using double ball bar. The International Journal of Advanced Manufacturing Technology, 110, 1351-1366(2020).
[9] F Li, H Dong, J Wang, et al. Error analysis of rotation positioning accuracy measured by laser tracker. Mechanical and Electrical Equipment, 38, 59-63(2021).
[10] B Bringmann, J P Besuchet, L Rohr. Systematic evaluation of calibration methods. CIRP Annals, 57, 529-532(2008).
[11] H Xia, M Hu, X Zhang. High precision of quadrature signals for homodyne interferometer. Optics and Precision Engineering, 25, 2309-2316(2017).
[12] L Li. Application of laser interferometer in XY table measurement. Equipment for Electronic Products Manufacturing, 49, 37-41(2020).
[13] S Ping, Y Fu, F Zhang, et al. Study on measurement method of mirror reflection laser tracking interferometric length measurement. Infrared and Laser Engineering, 50, 20210624(2021).
[14] J Li, Q Feng, C Bao, et al. Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis. Chinese Optics Letters, 17, 47-51(2019).
[15] J Xing, G Zhao. Research on compensation of laser interferometry. Laser Journal, 41, 63-66(2020).
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Yaowen Ding, Jiakun Li, Dong Ma, Haifeng Zhang, Qibo Feng. Signal processing method for measuring the radial motion error of rotary axis by interferometry[J]. Infrared and Laser Engineering, 2022, 51(12): 20220205
Category: Photoelectric measurement
Received: Apr. 14, 2022
Accepted: --
Published Online: Jan. 10, 2023
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