Fig. 1. Schematic diagram of measuring the radial motion error of an axis

Fig. 2. Schematic diagram of interference signals

Fig. 3. Principle of the CORDIC algorithm

Fig. 4. Sub-division principle for the integer part of signal

Fig. 5. Principle diagram of waveform counting

Fig. 6. Simulation signals of phase jitter

Fig. 7. The experimental devices

Fig. 8. Original signals and results of nonlinear correction

Fig. 9. Comparison of results by the eight-sub division algorithm

Fig. 10. Result of comparison error