Semiconductor Optoelectronics, Volume. 42, Issue 1, 61(2021)
Design and Fabrication of 3D MEMS Foldable System for Micro-IMU
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LI Zhiwei, ZHANG Weiping, GU Liutao. Design and Fabrication of 3D MEMS Foldable System for Micro-IMU[J]. Semiconductor Optoelectronics, 2021, 42(1): 61
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Received: Nov. 26, 2020
Accepted: --
Published Online: Mar. 18, 2021
The Author Email: Weiping ZHANG (zhangwp@sjtu.edu.cn)