Semiconductor Optoelectronics, Volume. 42, Issue 1, 61(2021)

Design and Fabrication of 3D MEMS Foldable System for Micro-IMU

LI Zhiwei1...2, ZHANG Weiping1,2,*, and GU Liutao12 |Show fewer author(s)
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  • 2[in Chinese]
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    References(7)

    [1] [1] Giansanti D, Maccioni G, Macellari V. The development and test of a device for the reconstruction of 3-D position and orientation by means of a kinematic sensor assembly with rate gyroscopes and accelerometers[J]. IEEE Trans. on Biomedical Engin., 2005, 52(7): 1271-1277.

    [2] [2] Yazdi N, Ayazi F, Najafi K. Micromachined inertial sensors[J]. Proc. of IEEE, 1998, 86(8): 1640-1659.

    [3] [3] Liu J, Shi Y, Zhang W. Micro inertial measurement unit based integrated velocity strapdown testing system[J]. Sensors & Actuators A: Physical, 2004, 112(1): 44-48.

    [4] [4] Ayazi F. Multi-dof inertial MEMS: From gaming to dead reckoning[C]// Proc. of IEEE Solid-State Sensors, Actuators and Microsystems Conf., 2011: 2805-2808.

    [5] [5] Chae J, Kulah H, Najafi K. A monolithic three-axis micro-G micromachined silicon capacitive accelerometer[J]. J. of Microelectromechanical Systems, 2005, 14(2): 235-242.

    [7] [7] Efimovskaya A, Lin Y W, Shkel A M. Origami-like 3-D folded MEMS approach for miniature inertial measurement unit[J]. J. of Microelectromechanical Systems, 2017, 26(5): 1-10.

    [8] [8] Dellea S, Giacci F, Longoni A, et al. Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors[C]// Proc. of IEEE Inter. Conf. on Micro Electro Mechanical Systems, 2015.

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    LI Zhiwei, ZHANG Weiping, GU Liutao. Design and Fabrication of 3D MEMS Foldable System for Micro-IMU[J]. Semiconductor Optoelectronics, 2021, 42(1): 61

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    Paper Information

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    Received: Nov. 26, 2020

    Accepted: --

    Published Online: Mar. 18, 2021

    The Author Email: Weiping ZHANG (zhangwp@sjtu.edu.cn)

    DOI:10.16818/j.issn1001-5868.2021.01.011

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