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Semiconductor Optoelectronics, Volume. 42, Issue 1, 61(2021)

Design and Fabrication of 3D MEMS Foldable System for Micro-IMU

LI Zhiwei1...2, ZHANG Weiping1,2,*, and GU Liutao12 |Show fewer author(s)
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    LI Zhiwei, ZHANG Weiping, GU Liutao. Design and Fabrication of 3D MEMS Foldable System for Micro-IMU[J]. Semiconductor Optoelectronics, 2021, 42(1): 61

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    Received: Nov. 26, 2020

    Accepted: --

    Published Online: Mar. 18, 2021

    The Author Email: Weiping ZHANG (zhangwp@sjtu.edu.cn)

    DOI:10.16818/j.issn1001-5868.2021.01.011

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology