Optics and Precision Engineering, Volume. 32, Issue 3, 366(2024)
Laser-induced plasma-assisted ablation of sapphire microstructures and their wettability
[1] [1] 聂辉, 陆炳哲. 蓝宝石及其在军用光电设备上的应用[J]. 舰船电子工程, 2005, 25(2): 131-142. doi: 10.3969/j.issn.1627-9730.2005.02.035NIEH, LUB ZH. Sapphire window and it’s application in military electro-optical equipment [J]. Ship Electronic Engineering, 2005, 25(2): 131-142. (in Chinese). doi: 10.3969/j.issn.1627-9730.2005.02.035
[2] V KURLOV, I SHIKUNOVA, A RYABOVA et al. Sapphire smart scalpel. Bulletin of the Russian Academy of Sciences: Physics, 73, 76-81(2009).
[3] G LIN, Y H HUANG. High mechanical strength sapphire cover lens for smartphone screen. Crystal Research and Technology, 53, 1800049(2018).
[4] C V NGO, D M CHUN. Fabrication of un-coated transparent superhydrophobic sapphire surface using laser surface ablation and heat treatment. CIRP Annals, 67, 571-574(2018).
[5] D K CHU, K YIN, X R DONG et al. Femtosecond laser fabrication of robust underwater superoleophobic and anti-oil surface on sapphire. AIP Advances, 7, 115224(2017).
[6] J W LEEM, J S YU. Wafer-scale highly-transparent and superhydrophilic sapphires for high performance optics. Optics Express, 20, 297-305(2012).
[7] [7] 卢文壮, 杨斌, 冯伟,等. 应用CVD金刚石涂层工具研磨单晶蓝宝石[J]. 光学 精密工程, 2016, 24(3): 540-546. doi: 10.3788/OPE.20162403.0540LUW ZH, YANGB, FENGW, et al. Lapping of sapphire wafers by CVD diamond coated tools [J]. Opt. Precision Eng., 2016, 24(3): 540-546. (in Chinese). doi: 10.3788/OPE.20162403.0540
[8] [8] 胡中伟, 邵铭剑, 郭建民, 等. 蓝宝石不同晶面磨削特性比较[J]. 光学精密工程, 2017,25(5): 1250-1258. doi: 10.3788/OPE.20172505.1250HUZ W, SHAOM J, GUOJ M, et al. Comparison of grinding characteristics of different crystal surfaces for sapphire [J]. Optics and Precision Engineering, 2017, 25(5): 1250-1258. (in Chinese). doi: 10.3788/OPE.20172505.1250
[9] Q L WEN, X Y WEI, F JIANG et al. Focused ion beam milling of single-crystal sapphire with A-, C-, and M-orientations. Materials (Basel), 13, 2871(2020).
[10] H A ATIKIAN, P LATAWIEC, M J BUREK et al. Freestanding nanostructures via reactive ion beam angled etching. APL Photonics, 2(2017).
[11] K J HAYWORTH, D PEALE, M JANUSZEWSKI et al. Gas cluster ion beam SEM for imaging of large tissue samples with 10 nm isotropic resolution. Nat Methods, 17, 68-71(2020).
[12] E R DOBROVINSKAYA, L A LYTVYNOV, V PISHCHIK.
[13] R VILAR, S P SHARMA, A ALMEIDA et al. Surface morphology and phase transformations of femtosecond laserprocessed sapphire. Applied Surface Science, 288, 313-323(2014).
[14] Q W WANG, Q L ZHANG, Z ZHANG et al. Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser. Ceramics International, 46, 21461-21470(2020).
[15] J ZHANG, K SUGIOKA, K Midorikawa. Laser-induced plasma-assisted ablation offused quartz using the fourth harmonic of a Nd+: YAG laser. Applied Physics A, 67, 545-549(1998).
[16] Q L WEN, J H CHEN, J LU et al. Effect of target on micromachining of sapphire using laser-induced plasma-assisted ablation. Ceramics International, 49, 14470-14477(2023).
[17] R MALHOTRA, I SAXENA, K EHMANN et al. Laser-induced plasma micro-machining (LIPMM) for enhanced productivity and flexibility in laser-based micro-machining processes. CIRP Annals, 62, 211-214(2013).
[18] H G LIU, W X LIN, M H HONG. Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications. Light: Science & Applications, 10, 162(2021).
[19] J L CHEN, X Z LU, Z LI et al. Anisotropy of material removal during laser-induced plasma assisted ablation of sapphire. Ceramics International, 48, 13880-13889(2022).
[20] Y HANADA, K SUGIOKA, K OBATA et al. Transient electron excitation in laser-induced plasma-assisted ablation of transparent materials. Journal of Applied Physics, 99, 1-6(2006).
[21] H G LIU, Y LI, W X LIN et al. High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation. Optics & Laser Technology, 132, 106472-106477(2020).
[22] C F PAN, K Y CHEN, B LIU et al. Fabrication of micro-texture channel on glass by laser-induced plasma-assisted ablation and chemical corrosion for microfluidic devices. Journal of Materials Processing Technology, 240, 314-323(2017).
[23] S J XU, B LIU, C F PAN et al. Ultrafast fabrication of micro-channels and graphite patterns on glass by nanosecond laser-induced plasma-assisted ablation (LIPAA) for electrofluidic devices. Journal of Materials Processing Technology, 247, 204-213(2017).
[24] X WANG, C FU, C ZHANG et al. A comprehensive review of wetting transition mechanism on the surfaces of microstructures from theory and testing methods. Materials, 15, 4747(2022).
[25] Z LI, Y LIU, W LI et al. Modeling of two-scale array microstructure and prediction of apparent contact angle based on WEDM. The International Journal of Advanced Manufacturing Technology, 121, 2699-2719(2022).
Get Citation
Copy Citation Text
Xiaoguang WANG, Qiuling WEN, Jinhong CHEN, Guoqin HUANG, Changcai CUI, Feng JIANG. Laser-induced plasma-assisted ablation of sapphire microstructures and their wettability[J]. Optics and Precision Engineering, 2024, 32(3): 366
Category:
Received: Jul. 18, 2023
Accepted: --
Published Online: Apr. 2, 2024
The Author Email: WEN Qiuling (qlwen@hqu.edu.cn)