Fig. 1. Schematic diagram of LIPAA experimental setup for sapphirp

Fig. 2. LIPAA processing experiment setup

Fig. 3. Schematic diagram of distance h between field lens and target

Fig. 4. SEM images of morphologies of sapphire microgrooves at different distances between field mirror and target

Fig. 5. Dependence of width （a） and depth （b） of sapphire microgrooves on distance between field mirror and target

Fig. 6. SEM images of morphologies of sapphire microgrooves at different laser powers

Fig. 7. Relationship of width （a） and depth （b） of sapphire microgroove with laser power respectively

Fig. 8. Evolution of surface morphologies of sapphire microgrooves with target-to-sapphire distance

Fig. 9. Width （a） and depth （b） of sapphire microgrooves as function of target-to-sapphire distance

Fig. 10. SEM images of morphologies of sapphire microgrooves at different scanning speeds

Fig. 11. Width （a） and depth （b） of sapphire microgrooves as function of scanning speed

Fig. 12. （a） Schematic diagram of contact angle and （b） Contact angle of original surface of sapphire

Fig. 13. Surface morphologies and the corresponding contact angles of sapphire microstructures

Fig. 14. Surface contact angles and corresponding surface micro-morphology of optimal hydrophobic and hydrophilic structures of sapphire

Fig. 15. EDS analysis of LIPAA-processed sapphire microstructures