Optics and Precision Engineering, Volume. 17, Issue 3, 549(2009)

Dynamic hysteresis model of piezopositioning stage

ZHANG Dong1,*... ZHANG Cheng-jin1 and WEI Qiang2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(19)

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    [8] [8] TIAN X J, WANG CH Y, Xi N, et al.. Actuator actuating and probe positioning of robotic nanomanipulation[J]. Chinese Journal of Scientific Instrument, 2007,28(7):1223-1228. (in Chinese)

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    [1] WEI Qiang, ZHANG Cheng-jin, ZHANG Dong, WANG Chun-ling. Neural network control for piezo-actuator using sliding-mode technique[J]. Optics and Precision Engineering, 2012, 20(5): 1055

    [2] YANG Bin-tang, ZHAO Yin, PENG Zhi-ke, MENG Guang. Real-time compensation control of hysteresis based on Prandtl-Ishlinskii operator for GMA[J]. Optics and Precision Engineering, 2013, 21(1): 124

    [3] ZHANG Dong, ZHANG Cheng-jin, WEI Qiang, TIAN Yan-bing, ZHAO Jing-bo, LI Xian-ming. Modeling and control of piezo-stage using neural networks[J]. Optics and Precision Engineering, 2012, 20(3): 587

    [4] YIN Bo-hua, CHEN Dai-xie, LIN Yun-sheng, CHU Ming-zhang, HAN Li. Design of AFM system with high speed and large scanning range[J]. Optics and Precision Engineering, 2011, 19(11): 2651

    [5] ZHANG Gui-lin, ZHANG Cheng-jin, ZHAO Xue-liang. Modeling of nonlocal memory hysteresis in piezoelectric actuators[J]. Optics and Precision Engineering, 2012, 20(5): 996

    [6] YANG Xiao-jing, PENG Yun-hao, LI Yao. Dynamic hysteresis modeling and experimental verification of piezoelectric positioning stage[J]. Optics and Precision Engineering, 2016, 24(9): 2255

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    ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549

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    Paper Information

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    Received: Jun. 16, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Dong ZHANG (zhangdonggraduate@163.com)

    DOI:

    CSTR:32186.14.

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