Optics and Precision Engineering, Volume. 17, Issue 3, 549(2009)
Dynamic hysteresis model of piezopositioning stage
[1] [1] LIU J B. Technology of Precision Stage in Micro-nano Fabrication[M]. Beijing: Publishing House of Beijing University of Technology, 2004. (in Chinese)
[2] [2] LI Q X, WANG D SH, LI Y H. Design of Modern Precision Instruments[M]. Beijing: Tsinghua University Press, 2004. (in Chinese)
[4] [4] DEVASIA S, ELEFTHERIOU E, MOHEIMANI S O R. A survey of control issues in nanopositioning[J]. IEEE Transactions on Control Systems Technolog, 2007,15(5):802-823.
[5] [5] BASHASH S, JALILI N. Robust multiple frequency trajectory tracking control of piezoelectrically driven micro/nanopositioning systems[J]. IEEE Transactions on Control Systems Technology, 2007,15(5):867-878.
[6] [6] LEANG K K, DEVASIA S. Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators[J]. IEEE Transactions on Control Systems Technology, 2007,15(5):927-935.
[8] [8] TIAN X J, WANG CH Y, Xi N, et al.. Actuator actuating and probe positioning of robotic nanomanipulation[J]. Chinese Journal of Scientific Instrument, 2007,28(7):1223-1228. (in Chinese)
[9] [9] LI CH T, TAN Y H. Modeling and control for nonlinear systems with hysteresis[J]. Control Theory and Application, 2005,22(2):281-287. (in Chinese)
[12] [12] LIN F J, SHIEH H J, HUANG P K. Adaptive wavelet neural network control with hysteresis estimation for piezo-positioning mechanism[J]. IEEE Transactions on Neural Networks, 2006,17(2):432-444.
[13] [13] ADRIAENS H, de KONING W, BANNING R. Modeling piezoelectric actuators[J]. IEEE/ASME Transactions on Mechatronics, 2000,5(4):331-341.
[14] [14] ANG W T, GARMN F A, KHOSLA P K, et al.. Modeling rate-dependent hysteresis in piezoelectric actuators[C]. Proceeding of IEEE International conference on intelligent robots and systems, 2003(2):1975-1980.
[15] [15] SHIEH H J, HSU C H. An integrator-backstepping-based dynamic surface control method for a two-axis piezoelectric micropositioning stage[J]. IEEE Transactions on Control Systems Technology,2007(5):916-926.
[16] [16] KREJCI P, KUHNEN K. Inverse control of system with hysteresis and creep[C]. IEE Proc.Control Theory Appl., 2001,148(3):185-192.
[17] [17] GE P, MUSA J. Modeling hysteresis in piezoceramic actuators[J]. Precision Engineering, 1995(1):211-221.
[18] [18] KUHNEN K, JANOCHA H. Inverse feedforward controller for complex hysteretic nonlinearities in smart-material systems[J]. Control Intell. Syst., 2001,29:74-83.
[19] [19] JANOCHA H, PESOTSKI D, KUHNEN K. FPGA-based compensator of hysteretic actuator nonlinearities for highly dynamic applications[J]. IEEE/ASME Transactions on mechatronics, 2008,13(1):112-116
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ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549
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Received: Jun. 16, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Dong ZHANG (zhangdonggraduate@163.com)
CSTR:32186.14.