Optics and Precision Engineering, Volume. 17, Issue 3, 549(2009)
Dynamic hysteresis model of piezopositioning stage
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ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549
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Received: Jun. 16, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Dong ZHANG (zhangdonggraduate@163.com)
CSTR:32186.14.