Optics and Precision Engineering, Volume. 17, Issue 3, 549(2009)

Dynamic hysteresis model of piezopositioning stage

ZHANG Dong1、*, ZHANG Cheng-jin1, and WEI Qiang2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to realize dynamic positioning of piezopositioning stage with high speed and high accuracy, the motion positioning model of the stage is studied. Because the dynamic positioning accuracy of piezopositioning stage is affected primarily by dynamic property and hysteresis property of the stage,this paper proposes a dynamic hysteresis model of piezopositioning stage after introducing two kinds of typical property models and their applicable scopes. Furthermore,the parameter identification method of the dynamic hysteresis model constituting of Prandtl-Ishlinskii (PI) hysteresis operator is given. Experimental studies on the TRITOR100 piezopositioning stage indicate that the dynamic hysteresis model is more accurate than both the linear dynamic model and PI hysteresis model when the stage positioning is dynamically positioned at high speed in ±900 V/s input voltage within 30 μm positioning range. The mean error of the dynamic hysteresis model is 0.16 μm, and the maximum error is 0.38 μm, which provides foundations for designing high performance control system of piezopositioning stage.

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    ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549

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    Paper Information

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    Received: Jun. 16, 2008

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Dong ZHANG (zhangdonggraduate@163.com)

    DOI:

    CSTR:32186.14.

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