Fig. 1. The excimer laser energy closed-loop control system

Fig. 2. Ideal single pulse power density curve

Fig. 3. Overall design of energy measurement system

Fig. 4. Design of front-end light path system

Fig. 5. Schematic diagram of measurement circuit

Fig. 6. Simplified circuit diagram for peak holding

Fig. 7. Peak holding equivalent circuit diagram

Fig. 8. Simulation pulse waveform

Fig. 9. Peak voltage acquisition process

Fig. 10. Pulse and Burst counting processes in 1 Burst

Fig. 11. The repetition frequency waveform of the laser measured when laser works at 6 kHz

Fig. 12. Measurement system for pulse parameters output waveform when laser works at 6 kHz

Fig. 13. Comparision between the reference value and measured value when the pulse energy of the laser is set as 7 mJ

Fig. 14. Fitting curve of energy and output voltage