Journal of Applied Optics, Volume. 45, Issue 2, 446(2024)
Research on information solution method of grating interference displacement sensor
[1] K SCHUEGRAF, M C ABRAHAM, A BRAND et al. Semiconductor logic technology innovation to achieve sub-10 nm manufacturing. IEEE Journal of the Electron Devices Society, 1, 66-75(2013).
[2] Lin LIU. Research on key technologies of large range, high precision, and miniaturized grating displacement measurement system(2022).
[3] Haoquan ZHANG. Design of a high-precision grating displacement measurement system based on FPGA(2022).
[4] Zhenhao JIE. Research on optical system for spectral confocal displacement measurement(2021).
[5] Jingjing DI. Design of a high-precision displacement measurement system based on diffraction gratings(2012).
[7] M LI, Z LIANG, R ZHANG et al. Large-scale range diffraction grating displacement sensor based on polarization phase-shifting. Applied Optics, 59, 469-473(2020).
[8] Jingkun WANG. Research and verification of grating ruler phase signal processing system(2021).
[9] Yuan ZHONG. Research and application of Moiré fringe signal subdivision method(2009).
[10] Rui GUO. Research on the subdivision method of Moiré fringe signal in incremental photoelectric encoder(2013).
[11] Yan ZHANG. Design of high-precision grating signal subdivision system(2019).
[12] Zelong MA. Research on correction and subdivision technology of sine and cosine encoding signals(2012).
[13] Gang LI. Research on adaptive subdivision method and error correction algorithm for raster signals(2018).
[15] Qianjin XING. Research on grating Moiré signal acquisition and subdivision technology(2018).
[17] Yu LIN. Research on compensation method for sinusoidal error of grating Moiré signal(2020).
[19] W ZHU, Y LIN, Y HUANG et al. Research on sinusoidal error compensation of Moiré signal using particle swarm optimization. IEEE Access, 8, 14820-14831(2020).
[20] Mingyang SHU, Jian CHEN. Research on subdivision error correction of grating interferometric sensing based on least squares method. Journal of Mechanical and Electrical Engineering, 36, 374-377(2019).
[21] Zhouxin LIANG. Design and implementation of a single-layer diffraction grating displacement sensor(2020).
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Kaixuan ZU, Rui ZHAO, Yunbo SHI, Xu ZHANG, Yunan CHEN, Fuming SHEN, Hao LIU. Research on information solution method of grating interference displacement sensor[J]. Journal of Applied Optics, 2024, 45(2): 446
Category: Research Articles
Received: May. 31, 2023
Accepted: --
Published Online: May. 28, 2024
The Author Email: ZHAO Rui (赵锐(1988—))