Researching | Research on information solution method of grating interference displacement sensor

Journal of Applied Optics, Volume. 45, Issue 2, 446(2024)

Research on information solution method of grating interference displacement sensor

Kaixuan ZU... Rui ZHAO*, Yunbo SHI, Xu ZHANG, Yunan CHEN, Fuming SHEN and Hao LIU |Show fewer author(s)

Author Affiliations

State Key Laboratory of Instrument Science and Dynamic Measurement, North University of China, Taiyuan 030051, China

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Figures & Tables(9)

Fig. 1. Effect diagram of DC component elimination

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Fig. 2. Results of compensation for signals with nonlinear errors

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Fig. 3. Results of phase interval division of output signals

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Fig. 4. Model of arctangent

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Fig. 5. Flow chart of linearization processing algorithm

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Fig. 6. Results of division for integer-period and non-integer-period data segments

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Fig. 7. Displacement solution results and solution errors

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Table 1. Conditions of phase interval division
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Table 1. Conditions of phase interval division
Phase interval $I_{S}$ $I_{C}$ $| I_{S} | - | I_{C} |$ Phase interval $I_{S}$ $I_{C}$ $| I_{S} | - | I_{C} |$
Interval 1 + + − Interval 5 − − −
Interval 2 + + + Interval 6 − − +
Interval 3 + − + Interval 7 − + +
Interval 4 + − − Interval 8 − + −

Table 2. Phase values for data points in each interval
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Table 2. Phase values for data points in each interval
Phase interval Phase Phase interval Phase
Interval 1 $ϕ$ Interval 5 $π + ϕ$
Interval 2 $π / 2 - ϕ$ Interval 6 $3 π / 2 - ϕ$
Interval 3 $π / 2 + ϕ$ Interval 7 $3 π / 2 + ϕ$
Interval 4 $π - ϕ$ Interval 8 $2 π - ϕ$

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Kaixuan ZU, Rui ZHAO, Yunbo SHI, Xu ZHANG, Yunan CHEN, Fuming SHEN, Hao LIU. Research on information solution method of grating interference displacement sensor[J]. Journal of Applied Optics, 2024, 45(2): 446

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Paper Information

Category: Research Articles

Received: May. 31, 2023

Accepted: --

Published Online: May. 28, 2024

The Author Email: ZHAO Rui (赵锐（1988—）)

DOI:10.5768/JAO202445.0208001

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology