[1] [1] Wan Y J, Shi C Y. Research on middle and high spatial-frequency errors by discrete particles abrasion［J］. Proc. SPIE, 2010, 7655: 163-170.

[2] [2] Tony Hull, Riso M J, Barentine J M, et al. Mid-spatial frequency matters: Examples of the control of the power spectral density and what that means to the performance of imaging systems［J］. Proc. SPIE, 2012, 8353: 835329.

[3] [3] Nakajima K, Owari T, Yoshiyuki. Low Thermal Expansion Substrate Material for EUVL Components Application［J］. Proc. SPIE, 2005, 5751: 146-157.

[5] [5] Kim D W, Park W H, An H K, et al. Parametric smoothing model for visco-elastic polishing tools［J］. Opt. Express, 2010, 18(21): 22515-22526.

[6] [6] Burge B A J H, Benjamin S, Cho M, et al. Development of optimal grinding and polishing tools for aspheric surfaces［J］. Proc. SPIE, 2001, 4451: 153-164.