Semiconductor Optoelectronics, Volume. 43, Issue 2, 358(2022)
Research on Active Smoothing Technology of High Gradient and Deep Optical Elements
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ZHANG Sui, WANG Jia, WANG Zhaoyang, DENG Yonghong, HOU Xi. Research on Active Smoothing Technology of High Gradient and Deep Optical Elements[J]. Semiconductor Optoelectronics, 2022, 43(2): 358
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Received: Sep. 17, 2021
Accepted: --
Published Online: Jul. 21, 2022
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