Chinese Physics B, Volume. 29, Issue 10, (2020)

Effect of source temperature on phase and metal–insulator transition temperature of vanadium oxide films grown by atomic layer deposition

Bingheng Meng... Dengkui Wang†, Deshuang Guo, Juncheng Liu, Xuan Fang, Jilong Tang, Fengyuan Lin, Xinwei Wang, Dan Fang and Zhipeng Wei |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology, Changchun 130022, China
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    Bingheng Meng, Dengkui Wang, Deshuang Guo, Juncheng Liu, Xuan Fang, Jilong Tang, Fengyuan Lin, Xinwei Wang, Dan Fang, Zhipeng Wei. Effect of source temperature on phase and metal–insulator transition temperature of vanadium oxide films grown by atomic layer deposition[J]. Chinese Physics B, 2020, 29(10):

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    Paper Information

    Received: Jan. 16, 2020

    Accepted: --

    Published Online: Apr. 21, 2021

    The Author Email: Wang Dengkui (zpweicust@126.com)

    DOI:10.1088/1674-1056/abaee7

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