Spectroscopy and Spectral Analysis, Volume. 33, Issue 3, 595(2013)
Spectrum Diagnostics for the Time of Pre-Sputtering in Thin Films Deposited by Magnetron Puttering
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GUO Qing-lin, FAN Qing, CUI Yong-liang, DONG Kai-hu, ZHANG Lei, LI Xu, ZHANG Jin-ping, CHEN Jin-zhong. Spectrum Diagnostics for the Time of Pre-Sputtering in Thin Films Deposited by Magnetron Puttering[J]. Spectroscopy and Spectral Analysis, 2013, 33(3): 595
Paper Information
Received: Aug. 20, 2012
Accepted: --
Published Online: Mar. 27, 2013
The Author Email: Qing-lin GUO (qlguo@hbu.edu.cn)
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