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Spectroscopy and Spectral Analysis, Volume. 33, Issue 3, 595(2013)

Spectrum Diagnostics for the Time of Pre-Sputtering in Thin Films Deposited by Magnetron Puttering

GUO Qing-lin*... FAN Qing, CUI Yong-liang, DONG Kai-hu, ZHANG Lei, LI Xu, ZHANG Jin-ping and CHEN Jin-zhong |Show fewer author(s)
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    GUO Qing-lin, FAN Qing, CUI Yong-liang, DONG Kai-hu, ZHANG Lei, LI Xu, ZHANG Jin-ping, CHEN Jin-zhong. Spectrum Diagnostics for the Time of Pre-Sputtering in Thin Films Deposited by Magnetron Puttering[J]. Spectroscopy and Spectral Analysis, 2013, 33(3): 595

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    Paper Information

    Received: Aug. 20, 2012

    Accepted: --

    Published Online: Mar. 27, 2013

    The Author Email: Qing-lin GUO (qlguo@hbu.edu.cn)

    DOI:10.3964/j.issn.1000-0593(2013)03-0595-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology