Fig. 1. Schematic diagram of inspection system for ion barrier MCP

Fig. 2. View diagram of ion barrier MCP with uniformity and no defects

Fig. 3. View diagram of bubbling defect

Fig. 4. Visual diagram of bubbling defect

Fig. 5. View diagram of black halo defect

Fig. 6. Visual diagram of black halo defect

Fig. 7. View diagram of black spot defect

Fig. 8. View and visual diagram of electric discharge defect

Fig. 9. View diagram of striped hole defect

Fig. 10. View diagram of graze defect and scratch defect

Fig. 11. View diagram of imprint with uneven electronic cleaning

Fig. 12. View diagram of imprint with excessive-energy electronic cleaning