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Acta Optica Sinica, Volume. 33, Issue 2, 231002(2013)

Shadowing Masks for Thickness Uniformity in a Plane Planetary System

Guo Chun1,2、*, Kong Mingdong1, Liu Cunding1, and Li Bincheng1
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    Guo Chun, Kong Mingdong, Liu Cunding, Li Bincheng. Shadowing Masks for Thickness Uniformity in a Plane Planetary System[J]. Acta Optica Sinica, 2013, 33(2): 231002

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    Paper Information

    Category: Thin Films

    Received: Sep. 4, 2012

    Accepted: --

    Published Online: Dec. 5, 2012

    The Author Email: Chun Guo (guochunyouxiang@126.com)

    DOI:10.3788/aos201333.0231002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology