High Power Laser and Particle Beams, Volume. 32, Issue 7, 071002(2020)

Impact of annealing on laser resistance of HfO2 films fabricated byALD, IBS and EBE techniques

Hao Liu1... Ping Ma2, Yunti Pu2 and Zuzhen Zhao1 |Show fewer author(s)
Author Affiliations
  • 1Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China
  • 2Research Center of Laser Fusion, CAEP, P. O. Box 919-988, Mianyang 621900, China
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    [6] [6] Rudolph W, Emmert L, Sun Z, et al. Laser damage in thin filmsWhat we know what we don’t[C]Proc of SPIE. 2013: 888516.

    [7] [7] Stolz C J, Sheehan L M, von Gunten M K, et al. Advantages of evapation of hafnium in a reactive environment fmanufacture of highdamagethreshold multilayer coatings by electronbeamdeposition[C]Advances in Optical Interference Coatings, International Society f Optics Photonics. 1999, 3738: 318324.

    [8] Andre B, Poupinet L, Ravel G. Evaporation and ion assisted deposition of HfO2 coatings: Some key points for high power laser applications[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 18, 2372-2377(2000).

    [10] [10] Ristau D, Gross T. Ion beam sputter coatings f laser technology[C]Proc of SPIE.2005: 596313.

    [11] [11] Mende M, Jensen L, Ehlers H, et al. Laser induced damage of pure mixture material high reflects f 355 nm 1064 nm wavelength[C]Proc of SPIE. 2011: 816821.

    [12] Wei Yaowei, Pan Feng, Zhang Qinghua. Atomic layer deposition for fabrication of HfO2/Al2O3 thin films with high laser induced damage thresholds[J]. Nano Express, 10, 1-7(2015).

    [13] [13] Jensen, L, Maedebach H, Maula J, et al. Laser induced damage threshold optical properties of TiO2 Al2O3coatings prepared by atomic layer deposition[C]Proc of SPIE. 2012: 853010.

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    Hao Liu, Ping Ma, Yunti Pu, Zuzhen Zhao. Impact of annealing on laser resistance of HfO2 films fabricated byALD, IBS and EBE techniques[J]. High Power Laser and Particle Beams, 2020, 32(7): 071002

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    Paper Information

    Category: High Power Laser Physics and Technology

    Received: Jan. 8, 2020

    Accepted: --

    Published Online: Jul. 10, 2020

    The Author Email:

    DOI:10.11884/HPLPB202032.200006

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