High-Performance Passive Silicon Photonic Waveguide Devices: Progress and Challenges

Dajian Liu; Weike Zhao; Long Zhang; Lijia Song; Jingshu Guo; Yiwei Xie; Huan Li; Zejie Yu; Liu Liu; Yaocheng Shi; Daoxin Dai

doi:10.3788/AOS202242.1713001

Acta Optica Sinica, Volume. 42, Issue 17, 1713001(2022)

High-Performance Passive Silicon Photonic Waveguide Devices: Progress and Challenges

Dajian Liu, Weike Zhao, Long Zhang, Lijia Song, Jingshu Guo, Yiwei Xie, Huan Li, Zejie Yu, Liu Liu, Yaocheng Shi, and Daoxin Dai^*

Author Affiliations

College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, Zhejiang, China

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Figures & Tables(13)

Fig. 1. Optical filters. (a) Single MRR filter based on multimode waveguide^[33]; (b) high-order MRR filter based on AEM^[35]; (c) 10^th-order AEM filter^[38]; (d) silicon quadplexer based on cascaded MWG^[39]

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Fig. 2. Polarization handling devices. (a) SWG-based polarizer^[57]; (b) polarizer based on 180° bending with SWG^[64]; (c) PBS based on cascaded bent waveguides^[65]; (d) PBS based on hetero-anisotropic SWG^[66]; (e) PSR based on adiabatic converter^[67];(f) polarization switch based on an MZI with ridge waveguide^[68]

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Fig. 3. Mode multiplexer. (a) Dispersion curves of multimode silicon waveguide^［103］; (b) 4-channle mode multiplexer based on ADC^[11]; (c) 8-channel dual-polarization mode multiplexer based on ADC^[102]; (d) 10-channel mode multiplexer based on adiabatic coupler and PBS^[103]

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$TE0-1 and TE0-2 mode converters with locally defined refractive index based on metamaterials[113]. (a) Simulated light propagations for mode exchangers; (b) SEM images of fabricated devices; (c) measured transmission spectra$

Fig. 4. TE_0-1 and TE_0-2 mode converters with locally defined refractive index based on metamaterials^[113]. (a) Simulated light propagations for mode exchangers; (b) SEM images of fabricated devices; (c) measured transmission spectra

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Fig. 5. Multimode transmission devices. (a) Multimode bending waveguide structure based on Euler bending^[118]; (b) multimode bending waveguide based on SWG structure^[119]; (c) multimode bending waveguide based on SWG/Euler combined structure^[120]; (d) multimode bending waveguide structure based on free curves^[122]; (e) start-crossing waveguide based on Maxwell lens^[126]; (f) multimode crossing waveguide based on anisotropic SWG^[129]

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Fig. 6. High-performance silicon photonic devices based on broadened waveguide. (a) Ultrahigh Q MRR^[138]; (b) low-loss delay line^[139]; (c) 2×2 MZI switch with low random phase error^[140]; (d) 4×4 MZI with low random phase error^[141]

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Fig. 7. Hybrid multiplexing systems. (a) Mode/wavelength hybrid multiplexer based on mode multiplexer and AWG^[146]; (b) hybrid multiplexer based on mode multiplexer and MRR^[149]; (c) ROADM based on mode multiplexer and MRR array^[153]

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Table 1. Summary of silicon-based on-chip optical polarizers reported in recent years

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Table 1. Summary of silicon-based on-chip optical polarizers reported in recent years

Ref.	Structure	Footprint	Loss /dB	PER /dB	BW_{20 dB} /nm
［55］	Shallow-ridge WG	>1000 μm	/	>25	100
［56］	Ultra-thin WG	>10000 μm	<0.3	>38	120
［57］	Bragg grating	9 μm	0.5	27	60
［58］	SWG WG	60 μm	<0.4	30	110
［59］	PhC WG	4 μm	1	34	50
［60］	ADC	~30 μm	~1	29.8	80
［61］	Cascaded bend	9.5 μm×63 μm	<0.37	>27.6	100
［62］	Disordered PhC	12.9 μm	0.6	39.6	210
［63］	HP Bragg grating	6 μm	~5	>24	60
［64］	SWG bend	6.5 μm×13 μm	<1	>20	415

Table 2. Summary of silicon-based on-chip PBS reported in recent years

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Table 2. Summary of silicon-based on-chip PBS reported in recent years

Ref.	Structure	Footprint	Loss /dB	PER /dB	BW_{20 dB} /nm
［78］	MMI	133 μm	2.2	28	40
［79］	3WG-DC	7.5 μm	1.7	22.5	100
［80］	BDC	3 μm×22.5 μm	<1	>20	60
［81］	Reflective ADC	27.5 μm	<1	>30	27
［65］	Cascaded BDC	7 μm×20 μm	0.35	>40	135
［82］	3WG-BDC	13 μm	0.6	>20	90
［83］	SWG ADC	2 μm	0.3	20	20
［84］	Reflective MMI	71.5 μm	0.8	32	77
［77］	SWG 3-WG ADC	75 μm	1	20	240
［66］	Anisotropic metamaterial	2 μm×12.5 μm	1	20	215

Table 3. Summary of silicon-based multi-channel mode multiplexers reported in recent years

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Table 3. Summary of silicon-based multi-channel mode multiplexers reported in recent years

Type	Year	Footprint	Capacity	Loss /dB		Crosstalk /dB		Bandwidth /nm
Type	Year	Footprint	Capacity	Sim.	Exp.	Sim.	Exp.	Sim.	Exp.
MMI^［95］	2012	80 μm	2	1	/	<-40	/	60	/
ADC^［11］	2013	~100 μm	4	0.1	1	-25	-23	/	20
Y branch^［97］	2016	~350 μm	3	0.32-0.82	5.7	-44.9--11.9	-9.7--31.5	120	29
Adiabatic ADC^［103］	2018	/	10	~0.5	1.8	<-30	-15--25	70	/
SWG ADC^［98］	2018	507 μm	11	/	0.1–2.6	/	-15.4--26.4	/	50
MMI^［99］	2020	136 μm	2	0.22-1.30	1.8	-25.2--20	-20	60	60
Inverse design^［100］	2022	20 μm×30 μm	4	/	0.62–5	/	-10--25		100

Table 4. Summary of silicon-based on-chip mode converters reported in recent years

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Table 4. Summary of silicon-based on-chip mode converters reported in recent years

Type	Year	Footprint /（μm×μm）	Loss /dB		Extinction ratio /dB		Bandwidth /nm
Type	Year	Footprint /（μm×μm）	Sim.	Exp.	Sim.	Exp.	Sim.	Exp.
MZI^［105］	2006	3×18	0.4	0.4	-	-	200	-
Cascaded taper^［106］	2015	2.83×13.12	~0.06	-	-	-	>60	-
LPG^［107］	2016	1×23	0.36	~0.55	14.5	13	-	-
Phase gradient metasurface^［108］	2017	0.6×12	14.8-4.4	-	>3 dB	-	1600	-
Inverse design^［109］	2018	1.6×4	0.86	1.34	-	~9.14	40	40
LPG^［110］	2018	1.1×5.75	~1	<1	11	>10	20	21
SWG structure^［111］	2020	1.3×2.7	0.19	0.23	19	>12	407	>80
SWG structure^［112］	2022	1.23×2.7	1.5	~3.8	~8	~7	100	30-60

Table 5. Summary of silicon-based multimode bending waveguides reported in recent years

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Table 5. Summary of silicon-based multimode bending waveguides reported in recent years

Type	Year	Radius /μm	Channel number	Loss /dB		Crosstalk /dB		Bandwidth /nm
Type	Year	Radius /μm	Channel number	Sim.	Exp.	Sim.	Exp.	Sim.	Exp.
Gradient index^［116］	2012	78.8	4	-	<3	-	-	-	-
Gradient index^［117］	2018	<30	4	0.88	1.5	<-20	<-20	80	80
Euler curves^［118］	2018	~45	4	<0.1	0.5	<-25	-19.2	100	90
Gradient index^［119］	2019	10	3	0.1-0.5	0.1-0.7	<-30	-22	100	80
Corner-bend^［120］	2020	>7	2-10	<0.18	<0.53	<-36	<-15	>420	280
Inverse design^［121］	2020	3.9	4	<1.1	<1.8	<-20	<-17	40	40
Free-form^［122］	2021	9.35	3	0.04	0.17	-24	-21	100	80

Table 6. Summary of silicon-based multimode crossing waveguides reported in recent years

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Table 6. Summary of silicon-based multimode crossing waveguides reported in recent years

Type	Year	Footprint /（µm×μm）	Capacity	Loss /dB		Crosstalk /dB		Bandwidth /nm
Type	Year	Footprint /（µm×μm）	Capacity	Sim.	Exp.	Sim.	Exp.	Sim.	Exp.
MMI couplers^［123］	2016	29×29	2	1.7	1.5	-32	-18	100	80
Asymmetric Y-junction^［124］	2018	34×34	3	1.5	2.0	-22	-20	60	60
Inverse design method^［125］	2018	4.8×4.8	2	0.5	0.6	-30	-24	80	60
Fisheye lens^［126］	2018	18×18	2	0.3	0.5	-20	-20	100	65
2D SWG^［129］	2022	14.8×14.8	3	0.15	0.26	-42	-20	300	>80

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Dajian Liu, Weike Zhao, Long Zhang, Lijia Song, Jingshu Guo, Yiwei Xie, Huan Li, Zejie Yu, Liu Liu, Yaocheng Shi, Daoxin Dai. High-Performance Passive Silicon Photonic Waveguide Devices: Progress and Challenges[J]. Acta Optica Sinica, 2022, 42(17): 1713001

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Paper Information

Category: Integrated Optics

Received: Jul. 15, 2022

Accepted: Aug. 8, 2022

Published Online: Sep. 16, 2022

The Author Email: Dai Daoxin (dxdai@zju.edu.cn)

DOI:10.3788/AOS202242.1713001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology