Infrared and Laser Engineering, Volume. 45, Issue 12, 1204001(2016)
Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method
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Qiao Hui, Chen Xintian, Zhao Shuiping, Lan Tianyi, Wang Nili, Zhu Longyuan, Li Xiangyang. Study of the sub-surface damage of HgCdTe induced by chemical-mechanical polishing method[J]. Infrared and Laser Engineering, 2016, 45(12): 1204001
Paper Information
Category: 红外技术及应用
Received: Apr. 17, 2016
Accepted: May. 20, 2016
Published Online: Jan. 12, 2017
The Author Email: Hui Qiao (qiaohui@mail.sitp.ac.cn)
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