[1] [1] JAKUB P, BARBARA K, MIROSLAV B. Synthesis of hyperbranched copolyimides and their application as selective layers in composite membranes ［J］. Desalination, 2009,245(1-3): 516-526.

[2] [2] SVETOVOY V B, AMIROV I I, BABANOVYE. Laser direct writing system for fabrication of smooth-relief micro-optical elements ［C］. SPIE,1996, 2969: 248-251.

[3] [3] PRATE B, ARNOLD C B, PIQUE A. Depth and surface roughness control on laser micromachined polyimide for direct-write ceposition［C］. Photo-Optical Instrumentation Engineers, 2003, 4979: 217-225.

[4] [4] WOCHNOWSKI C , CHENG Y, METEVA K . Femtosecond-laser induced formation of grating structures in planar polymer substrates ［J］. Optics A:Pure and Applied Optics, 2005, 7(9): 493-501.

[5] [5] GU J H, LOW J, LIM P K. Nd: YAG laser cleaning of ablation debris from excimer laser ablated polyimide ［C］. Photo-Optical Instrumentation Engineers, 2001,4592:293-300.

[6] [6] WEN C H, CHUANG M J, HSIUE G H. Plasma fluorination of polymers in glow discharge plasma with a continuous process ［J］. Thin Solid Films,2006,503(1-2):103-109.

[7] [7] SUN Cheng-long, DU Gen-di, GUO Fang-min. Reactive ion etching of polyimide film using SF6+O2［J］. Journal of Applied Sciences, 1993,11(1): 31-36.

[8] [8] MOUSSANT C, LUCAS B, MOLITION A. Etching techniques using a collimated ion beam for the realization of waveguides ［J］. Synthetic Metals, 2000, 115(1-3): 29-32.

[9] [9] DONG Shuan-cheng, FAN Wei-zheng, MA Bin-he. Research on the polyimide micro-etching process［J］. Micronanoelectronic Technology, 2012, 49(5):323-327.

[10] [10] SHIMOKAWA F , FURUYA A , MATSUI S. Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system ［C］. IEEE Micro Electro Mechanical Systems, 1991: 192-197.

[11] [11] ATCHESON P, STEWART C, DOMBER J. MOIRE-initial demonstration of a transmissive diffractive membrane optic for large lightweight optical telescopes ［C］. SPIE, 2012, 8442: 844221-14.

[12] [12] ASMOLOVA O, ANDERSEN G, DEARBORN M E, et al. Optical analysis of a membrane photon sieve space telescope ［C］. SPIE , 2013, 8739: 87390C.

[13] [13] ASMOLOVA O, ANDERSEN G, DEARBORN M E, et al. Optical testing of a membrane diffractive optic for space-based solar ［C］. SPIE, 2014, 9006 : 90060D.

[14] [14] DONG Xiao-chun. Research on fabrication technology of micro optics element with free-arrangement aspheric profile ［D］. The Institute of Optics and Electronics the Chinese Academy of Sciences, 2009.

[15] [15] DU Chun-lei, DONG Xiao-chun, QIU Chuan-kai. Profile control technology for high-performance micro-lens array ［J］. Optical Engineering, 2004, 43(11): 2595-2602.

[16] [16] PESSOA R S, PARADA S W C, FRAGA M A. Studies about flow rate effect on atomic fluorine generation in inductively coupled CF4 plasmas；a global model investigation ［J］.ECS Transactions, 2010,31(1): 125-134.

[17] [17] MENG Jie, CAO Zi-jian, JIN Lin, et al. Plasma etching technology for polymer optical waveguide fabrication ［J］. Acta Photonica Sinica,2011,40(1): 0007-0010 .

[18] [18] BUDER U, BERNS A, OBERMEIER E. Aero-MEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations ［J］. IEEE Sensors, 2005, 1-2: 545-548.