Acta Optica Sinica, Volume. 40, Issue 24, 2412002(2020)
Evaluation of Optical Performance of Free-Form Surface Imaging System
[1] Liu X L, Zhang X D, Fang F Z et al. Influence of machining errors on form errors of microlens arrays in ultra-precision turning[J]. International Journal of Machine Tools and Manufacture, 96, 80-93(2015).
[2] Tamkin J M, Milster T D. Effects of structured mid-spatial frequency surface errors on image performance[J]. Applied Optics, 49, 6522-6536(2010).
[3] Yabe A. Desensitization to mid-spatial-frequency surface errors[J]. Optics Express, 27, 29985-29991(2019).
[4] Aryan H, Boreman G D, Suleski T J. Simple methods for estimating the performance and specification of optical components with anisotropic mid-spatial frequency surface errors[J]. Optics Express, 27, 32709-32721(2019).
[6] Meiling H. Benschop J P H, Dinger U, et al. Progress of the EUVL alpha tool[J]. Proceedings of SPIE, 4343, 38-50(2001).
[7] Gerchberg R W, Saxton W O. Practical algorithm for the determination of phase from image and diffraction plane pictures[J]. Optik (Stuttgart), 35, 237-250(1972).
[8] Gonsalves R A, Chidlaw R. Wavefront sensing by phase retrieval[J]. Proceedings of SPIE, 0207, 32-39(1979).
[9] Gonsalves R A. Phase retrieval and diversity in adaptive optics[J]. Optical Engineering, 21, 215829(1982).
[10] Fienup J R. Phase retrieval algorithms: a comparison[J]. Applied Optics, 21, 2758-2769(1982).
[11] Gu B Y, Yang G Z, Dong B Z. General theory for performing an optical transform[J]. Applied Optics, 25, 3197-3206(1986).
[12] Basinger S A, Redding D C, Lowman A E et al. Performance of wavefront sensing and control algorithms on a segmented telescope testbed[J]. Proceedings of SPIE, 4013, 749-756(2000).
[16] Paine S W, Fienup J R. Machine learning for improved image-based wavefront sensing[J]. Optics Letters, 43, 1235-1238(2018).
[19] Goodman J W, Goodman J W[M]. 傅里叶光学导论, 91-118(2016).
[M]. Introduction to Fourier optics, 91-118(2016).
[20] [M]. Principles of optics: electromagnetic theory of propagation, interference and diffraction of light, 412-547(1999).
Born M, Born M, Wolf E, Wolf E[M]. 光学原理: 光的传播、干涉和衍射的电磁理论, 412-547(1999).
[21] Matsushima K, Shimobaba T. Band-limited angular spectrum method for numerical simulation of free-space propagation in far and near fields[J]. Optics Express, 17, 19662-19673(2009).
[22] Katkovnik V, Migukin A, Astola J. Backward discrete wave field propagation modeling as an inverse problem: toward perfect reconstruction of wave field distributions[J]. Applied Optics, 48, 3407-3423(2009).
[23] Voelz D G[M]. Computational Fourier optics a Matlab tutorial, TT89, 47-86(2011).
[24] Wyant J C, Creath K. Basic wavefront aberration theory for optical metrology[J]. Applied Optics and Optical Engineering, 11, 28-39(1992).
[25] Ghiglia D C, Pritt Mark D. Two-dimensional phase unwrapping: theory, algorithms, and software[M]. New York: John Wiley & Sons, Inc, 178-279(1998).
[26] Brady G R, Fienup J R. Measurement range of phase retrieval in optical surface and wavefront metrology[J]. Applied Optics, 48, 442-449(2009).
[27] Brady G R, Fienup J R. Range of phase retrieval in optical metrology. [C]//Frontiers in optics, October 16-21,2005, Tucson, Arizona, US. Washington: OSA, FTuS3(2005).
[28] Lowman A E, Redding D C, Basinger S A et al. Phase retrieval camera for testing NGST optics[J]. Proceedings of SPIE, 4850, 329-335(2003).
[29] Zhao L, Huang X, Bai J et al. Comparative analysis of mid-spatial frequency errors measurement using multiple phase retrieval algorithms[J]. Proceedings of SPIE, 1081, 108151M(2018).
[30] Michalko A M, Fienup J R. Development of a convex surface measurement using prescription retrieval. [C]//Freeform Optics 2019, June 10-12, 2019, Washington DC, US. Washington: OSA, JW2A, 7(2019).
[31] Michalko A M, Fienup J R. Transverse translation diverse phase retrieval for reflective and freeform surface metrology. [C]//Frontiers in Optics 2016, Rochester, New York. Washington, D.C.: OSA, FW5H, 4(2016).
[32] Ding L Y. Application of phase retrieval to the measurement of aspheric surfaces[D]. Changsha: National University of Defense Technology, 96-140(2011).
[33] Cheng Q. The research on phase retrieval in space-borne camera based on phase diversity Changchun: Changchun Institute of Optics, Fine Mechanics and Physics,[D]. Chinese Academy of Sciences, 119-133(2013).
Get Citation
Copy Citation Text
Yuqiang Chen, Xiaodong Zhang, Xianlei Liu. Evaluation of Optical Performance of Free-Form Surface Imaging System[J]. Acta Optica Sinica, 2020, 40(24): 2412002
Category: Instrumentation, Measurement and Metrology
Received: Jul. 1, 2020
Accepted: Sep. 24, 2020
Published Online: Dec. 3, 2020
The Author Email: Liu Xianlei (liuxianlei1987@tju.edu.cn)