Evaluation of Optical Performance of Free-Form Surface Imaging System

Yuqiang Chen; Xiaodong Zhang; Xianlei Liu

doi:10.3788/AOS202040.2412002

Acta Optica Sinica, Volume. 40, Issue 24, 2412002(2020)

Evaluation of Optical Performance of Free-Form Surface Imaging System

Yuqiang Chen, Xiaodong Zhang, and Xianlei Liu^*

State Key Laboratory of Precision Measuring Technology & Instruments, Centre of Micro Nano Manufacturing Technology, Tianjin University, Tianjin 300072, China

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Figures & Tables(17)

Fig. 1. Evaluation system of basic index of optical performance

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Fig. 2. Flow chart of M-GS algorithm

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Fig. 3. Schematic diagram of measurement of M-GS algorithm

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Fig. 4. Schematic diagram of the optical path of plano-convex lens

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Fig. 5. Simulation results of ZEMAX. (a) WFE; (b) PSF; (c) MTF

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Fig. 6. Comparison of computational results. (a) PSF; (b) enlarged view of PSF center; (c) tangential MTF; (d) sagittal MTF

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Fig. 7. Image spots obtained at different defocus distances. (a) 1000 μm; (b) -500 μm; (c) 0 μm; (d) 500 μm; (e) 1000 μm

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Fig. 8. WFE obtained by different methods. (a) ZEMAX; (b) M-GS algorithm

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Fig. 9. Experiment configuration

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Fig. 10. Actual image spots at different defocus distances. (a) -1000 μm; (b) -600 μm; (c) -200 μm; (d) 200.0 μm; (e) 600 μm; (f) 1000 μm

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Fig. 11. WFE obtained by different methods. (a) Interferometer; (b) M-GS algorithm

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Fig. 12. PSF measured by different methods. (a) Center profile in X direction; (b) center magnified view in X direction; (c) center profile in Y direction; (d) center magnified view in Y direction

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Fig. 13. MTF obtained by different methods. (a) X direction; (b) Y direction

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Table 1. Simulation parameter of the plano-convex lens
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Table 1. Simulation parameter of the plano-convex lens
Type Radius /mm Thickness /mm Material Semi-diameter /mm Z₄/λ Z₅/λ Z₈/λ
Standard 206.100 2.380 BK7 12.500 / / /
Zernike fringe phase(stop) ∞ 399.040 / 12.500 0.3 0.2 0.1

Table 2. WFE parameters obtained by different methods
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Table 2. WFE parameters obtained by different methods
WFE PV/λ RMS/λ
ZEMAX 0.7493 0.1341
Calculated by our model 0.7471 0.1337

Table 3. Main parameters of experiment devices

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Table 3. Main parameters of experiment devices

Experiment device	Main parameter
TRIOPTICS μPhase 1000Twyman-Green interferometer	lens type: plano50, Dia:Φ50 mm,camera inside: 1024 pixel×1020 pixel, 8 bits,wavelength: 632.8 nm, uncertainty: λ/20,method: five step phase-shifting method
KOHZU XA10A-R2 Stepper motor	resolution: 1 μm, range: 2 5 mmstraightness: < 1 μm/25 mm
Hikvision MV-CA030-10GM CCD Camera	pixel size: 3.69 μm×3.69 μm, 1920 pixel×1080 pixelinterface: GigE, FPS: 25 frame
Plano-convex lens under test	diameter: 34.000 mm, focal: 200 mm, material: N-BK7radius: 103.010 mm, thickness: 2.780 mm
HengYang GCM-1123M three-degree of freedom rotational platform	range: ±4°, resolution: 2'

Table 4. WFE parameters obtained by different methods (actual spot)
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Table 4. WFE parameters obtained by different methods (actual spot)
WFE PV/λ RMS/λ
Interferometer 0.1944 0.0240
Calculated by our model 0.1910 0.0458

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Yuqiang Chen, Xiaodong Zhang, Xianlei Liu. Evaluation of Optical Performance of Free-Form Surface Imaging System[J]. Acta Optica Sinica, 2020, 40(24): 2412002

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