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Laser & Optoelectronics Progress, Volume. 60, Issue 7, 0731002(2023)

Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films

Junchen Liao1, Rui Qian2, Dong Chen1, Haijin Chen1, Guoping Luo1、*, and Weiling Zhu1
Author Affiliations
  • 1School of Science, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China
  • 2State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, Guangdong, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
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    References (37)
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    Figures & Tables(12)
    Influence of N2/O2 flows on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) absorption spectra

    Fig. 1. Influence of N2/O2 flows on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) absorption spectra

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    XRD spectra of GAZO/Ag/GAZO thin films

    Fig. 2. XRD spectra of GAZO/Ag/GAZO thin films

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    Cross-section SEM and surface AFM images of GAZO/Ag/GAZO thin films. SEM images of (a) sample A,(b) sample B, and (c) sample C; AFM images of (d) sample A, (e) sample B, and (f) sample C

    Fig. 3. Cross-section SEM and surface AFM images of GAZO/Ag/GAZO thin films. SEM images of (a) sample A,(b) sample B, and (c) sample C; AFM images of (d) sample A, (e) sample B, and (f) sample C

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    Optical properties of GAZO/Ag/GAZO thin films as a function of O2 flows. (a) Transmittance spectra; (b) absorption spectra

    Fig. 4. Optical properties of GAZO/Ag/GAZO thin films as a function of O2 flows. (a) Transmittance spectra; (b) absorption spectra

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    Influence of O2 flows on electric properties and FoM of GAZO/Ag/GAZO thin films. (a) Carrier concentration and mobility; (b) resistivity and FoM

    Fig. 5. Influence of O2 flows on electric properties and FoM of GAZO/Ag/GAZO thin films. (a) Carrier concentration and mobility; (b) resistivity and FoM

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    Influence of Ag thickness on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) relation curve between dT/dE and incident light energy

    Fig. 6. Influence of Ag thickness on optical properties of GAZO/Ag/GAZO thin films. (a) Transmittance spectra; (b) relation curve between dT/dE and incident light energy

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    Influence of Ag thickness on electric properties andFoM of GAZO/Ag/GAZO thin films. (a) Carriers concentration and mobility; (b) resistivity and FoM

    Fig. 7. Influence of Ag thickness on electric properties andFoM of GAZO/Ag/GAZO thin films. (a) Carriers concentration and mobility; (b) resistivity and FoM

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    Transmittance and XRD spectra of GAZO/Ag/GAZO thin films with different annealing temperatures. (a) Transmittance spectra; (b) XRD spectra

    Fig. 8. Transmittance and XRD spectra of GAZO/Ag/GAZO thin films with different annealing temperatures. (a) Transmittance spectra; (b) XRD spectra

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    • Table 1. Structure and morphology parameters of GAZO/Ag/GAZO thin films

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      Table 1. Structure and morphology parameters of GAZO/Ag/GAZO thin films

      SampleGas2θ /（°）β /nmD /nmRrms /nm
      ZnOAgZnOAgZnOAg
      AWithout N2/O234.5438.400.700.9011.889.341.24
      BN2（1.5 sccm）34.5638.240.790.9810.538.582.55
      CO2（1.5 sccm）34.5238.280.620.9013.419.345.41

    • Table 2. Relationship between O2 flows and photoelectric properties of GAZO/Ag/GAZO thin films

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      Table 2. Relationship between O2 flows and photoelectric properties of GAZO/Ag/GAZO thin films

      O2 /sccmRsh /（Ω·sq-1）Tav /%ρ /（10-4 Ω·cm）n /（1021 cm-3）μ /（cm2·V-1·s-1）FoM /Ω-1
      06.4596.530.587.0315.301641
      0.58.7792.640.796.5712.03552
      1.010.0796.200.917.089.73957
      1.511.3094.111.026.828.96541
      3.044.1076.903.976.192.5430

    • Table 3. Relationship between Ag thickness and photoelectric properties of GAZO/Ag/GAZO thin films

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      Table 3. Relationship between Ag thickness and photoelectric properties of GAZO/Ag/GAZO thin films

      Ag thickness /nmRsh /（Ω·sq-1）ρ /（10-4 Ω·cm）n /（1021 cm-3）μ /（cm2·V-1·s-1）Tav /%FoM /Ω-1
      640.593.494.004.4780.8841
      820.821.835.076.7287.58132
      1014.401.296.207.7995.93624
      1210.070.917.089.7396.20957
      147.030.667.8612.0284.67309

    • Table 4. Influence of annealing temperature on photoelectric and structural properties of GAZO/Ag/GAZO thin films

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      Table 4. Influence of annealing temperature on photoelectric and structural properties of GAZO/Ag/GAZO thin films

      AnnealingRsh/（Ω·sq-1）n /（1021 cm-3）μ /（cm2·V-1·s-1）Tav /%FoM /Ω-12θ /（°）β /nmD /nm
      Room temperature10.077.089.7396.2095734.250.6013.85
      150 ℃8.996.7711.2098.17226034.370.3921.26
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    Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002

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    Paper Information

    Category: Thin Films

    Received: Dec. 27, 2021

    Accepted: Jan. 25, 2022

    Published Online: Mar. 31, 2023

    The Author Email: Luo Guoping (guopingluo@126.com)

    DOI:10.3788/LOP213361

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology