Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films

Junchen Liao; Rui Qian; Dong Chen; Haijin Chen; Guoping Luo; Weiling Zhu

doi:10.3788/LOP213361

Laser & Optoelectronics Progress, Volume. 60, Issue 7, 0731002(2023)

Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films

Junchen Liao¹, Rui Qian², Dong Chen¹, Haijin Chen¹, Guoping Luo^1、*, and Weiling Zhu¹

Author Affiliations

¹School of Science, Guangdong University of Petrochemical Technology, Maoming 525000, Guangdong, China

²State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou 510640, Guangdong, China

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Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002

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Paper Information

Category: Thin Films

Received: Dec. 27, 2021

Accepted: Jan. 25, 2022

Published Online: Mar. 31, 2023

The Author Email: Luo Guoping (guopingluo@126.com)

DOI:10.3788/LOP213361

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology