Laser & Optoelectronics Progress, Volume. 60, Issue 7, 0731002(2023)
Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films
Multisource magnetron sputtering technology was used to prepare Ga and Al co-doped zinc oxide (GAZO)/Ag/GAZO transparent conductive thin films on a glass substrate. Comparative experiments showed that sputtering Ag with oxygen can increase the optical transmittance of the thin films in the 600-800 nm spectral region. After further optimization, at an oxygen flow of 1.0 sccm, Ag films with a thickness of 12 nm obtained continuous structure, which improved the photoelectric properties of the GAZO/Ag/GAZO thin films. Subsequent annealing at 150 ℃ for 1 h under ambient pressure further improved the photoelectric and structural properties of GAZO/Ag/GAZO thin films. After annealing, the sheet resistance of the thin films is 8.99 Ω/sq, the average transmittance in the 380-780 nm visible region is 98.17%, and the figure of merit is as high as 2260 Ω-1. The prepared GAZO/Ag/GAZO transparent conductive thin films show excellent photoelectric properties and are expected to replace indium tin oxide films in the field of optoelectronic devices.
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Junchen Liao, Rui Qian, Dong Chen, Haijin Chen, Guoping Luo, Weiling Zhu. Magnetron Sputtering Preparation and Photoelectric Property Optimization of GAZO/Ag/GAZO Transparent Conductive Thin Films[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0731002
Category: Thin Films
Received: Dec. 27, 2021
Accepted: Jan. 25, 2022
Published Online: Mar. 31, 2023
The Author Email: Luo Guoping (guopingluo@126.com)