Preparation and Epitaxy Application of 8 Inch SiC Wafers

HAN Jingrui; LI Xiguang; LI Yongmei; WANG Yaohao; ZHANG Qingchun; LI Da; SHI Jianxin; YAN Honglei; HAN Yuebin; TING Hungkit

Journal of Synthetic Crystals, Volume. 53, Issue 10, 1712(2024)

HAN Jingrui1... LI Xiguang1, LI Yongmei1, WANG Yaohao2, ZHANG Qingchun3, LI Da4, SHI Jianxin4, YAN Honglei4, HAN Yuebin4 and TING Hungkit1,* |Show fewer author(s)

Author Affiliations

¹Guangdong TYSiC Semiconductor Co. Ltd., Dongguan 523808, China

²Guangzhou Summit Crystal Semiconductor Co., Ltd., Guangzhou 511458, China

³SICHAIN Semiconductor Co., Ltd., Ningbo 315336, China

⁴SiCentury Semiconductor Technology (Suzhou) Co., Ltd., Suzhou 215021, China

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HAN Jingrui, LI Xiguang, LI Yongmei, WANG Yaohao, ZHANG Qingchun, LI Da, SHI Jianxin, YAN Honglei, HAN Yuebin, TING Hungkit. Preparation and Epitaxy Application of 8 Inch SiC Wafers[J]. Journal of Synthetic Crystals, 2024, 53(10): 1712

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