Journal of Synthetic Crystals, Volume. 53, Issue 10, 1712(2024)

Preparation and Epitaxy Application of 8 Inch SiC Wafers

HAN Jingrui1... LI Xiguang1, LI Yongmei1, WANG Yaohao2, ZHANG Qingchun3, LI Da4, SHI Jianxin4, YAN Honglei4, HAN Yuebin4 and TING Hungkit1,* |Show fewer author(s)
Author Affiliations
  • 1Guangdong TYSiC Semiconductor Co. Ltd., Dongguan 523808, China
  • 2Guangzhou Summit Crystal Semiconductor Co., Ltd., Guangzhou 511458, China
  • 3SICHAIN Semiconductor Co., Ltd., Ningbo 315336, China
  • 4SiCentury Semiconductor Technology (Suzhou) Co., Ltd., Suzhou 215021, China
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    Silicon carbide (SiC) is one of the superior materials used in the manufacture of electronic components designed to work at high temperatures, high frequencies and high-power. In the past two decades, the application of SiC materials has been expanding as a result of much improved production and processing techniques. Although most SiC chips are still mainly made from 6 inch (1 inch=25.4 mm) wafers, leading manufacturers have begun developing next-generation parts and chips based upon 8 inch SiC wafers. This study collaborates with leading enterprises in the upstream and downstream of the domestic silicon carbide industry chain in order to facilitate domestic production of 8 inch SiC chips, with the focus being wafer preparation and epitaxial growth. In this work, 8 inch conductive 4H-SiC substrate wafer was prepared by diameter expansion growth, with low average base plane dislocation (BPD) density (251 cm-2) and virtually ‘zero threading screw dislocation (TSD)’ density (<1 cm-2) that meet the production requirements. Based on these 8 inch substrates, we achieve fast epitaxial growth (68.66 μm/h) with domestically produced 8 inch epitaxy equipment and processing packages. The thickness uniformity of the resultant wafers is 0.89% and the doping uniformity is 2.05%. These parameters, as well as the defect density, are on par with those of high-quality 6-inch wafers, fully meeting production requirements. The 8 inch wafers prepared in this paper are better than those described in international publications in terms of thickness and doping uniformity. The defect density is only 1/4 of international data. In this paper, multi-wafer repetative text was designed and executed, to verify the stability of 8 inch epitaxy.

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    HAN Jingrui, LI Xiguang, LI Yongmei, WANG Yaohao, ZHANG Qingchun, LI Da, SHI Jianxin, YAN Honglei, HAN Yuebin, TING Hungkit. Preparation and Epitaxy Application of 8 Inch SiC Wafers[J]. Journal of Synthetic Crystals, 2024, 53(10): 1712

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    Paper Information

    Category:

    Received: Jun. 18, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email: Hungkit TING (ding.xiongjie@sicty.com)

    DOI:

    CSTR:32186.14.

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