Opto-Electronic Advances, Volume. 8, Issue 1, 240114-1(2025)

Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator (LNOI) platform

Zhi Jiang1, Cizhe Fang1,3, Xu Ran1, Yu Gao1, Ruiqing Wang1, Jianguo Wang2, Danyang Yao1、*, Xuetao Gan2、**, Yan Liu1,3, Yue Hao1, and Genquan Han1,3
Author Affiliations
  • 1State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi’an 710071, China
  • 2Key Laboratory of Light Field Manipulation and Information Acquisition, Ministry of Industry and Information Technology, and Shaanxi Key Laboratory of Optical Information Technology, School of Physical Science and Technology, Northwestern Polytechnical University, Xi’an 710129, China
  • 3Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
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    Figures & Tables(7)
    (a) The schematic of the polymer-loaded waveguide. (b) The waveguide loss of different optical modes vs. waveguide width w at 1550 nm. The inset illustrates the photonic potential distribution for the TM00 mode at various waveguide widths. The blue background represents the TE continuum. (c) The electric field (|Ey|) profiles for TM00 and TM01 modes. (d) The electric field (|Ez|) profiles for TE00 and TE01 modes.
    (a) Schematic diagram of the polymer-loaded PCNBC. (b) The band diagram of the TE00 modes for different filling factors: f = 0.3 (blue line) and f = 0.42 (red line). The inset shows the enlarged boxed region and the resonant frequency of the fundamental mode is marked with a red dot. (c) The mirror strength vs. filling factor. (d) The top views of the electric field (|Ez|) profile for the fundamental mode and second-order mode. The orientation of the PCNBC is along the x direction of the LN crystal. (e) Electric field (Ez) distribution profile of the magnified region in (d). The inset shows the electric profile at the y-z plane.
    (a) SEM image of the fabricated PCNBC. The bottom insets show the grating coupler (left) and the central region of the cavity (right), respectively. (b) Measured transmission spectrum of a cavity with fc = 0.42, fe = 0.3, Nt = 120, Nm = 100, and w = 2 μm. Inset: the detailed transmission spectrum of the fundamental mode is fitted with a Lorentzian line shape at around 1528.320 nm. (c) Measured Q factors of the fundamental mode vs. waveguide width w. (d) Measured transmission spectra of the fundamental mode for different Nt at Nm = 100. (e) Measured transmission spectra of the fundamental mode for different Nm at Nt = 120. The inset shows the Lorentzian fitting of the transmission spectrum at Nm = 200.
    (a) Measured transmission spectra of the PCNBC at different temperatures. The Q factor of the PCNBC is 0.8×105. (b) Measured ΔTπ and the sensitivity of temperature for various devices with different Q factors.
    (a) The measured transmission spectra of a PCNBC (Q is 1.04×105) at different input powers. The threshold power is 160 μW. (b) The measured threshold power for the devices with different transmissions and Q factors.
    (a) Optical micrograph of the tested PCNBC. The locations of the fibers are indicated by red dots. (b) The measured transmission spectra at different input fiber displacements. The device has a Q of 1.04×105. (c) Devices with different Q factors are measured for Δφ.
    • Table 1. Comparison of various PCNBCs on LN substrate.

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      Table 1. Comparison of various PCNBCs on LN substrate.

      Device structurePolarization modesQ (×105)Transmission (%)Extinction ratio (dB)Footprint (μm2)
      Dimensions of A: w = 2 μm, Nt = 120, Nm = 140, fc =0.42, and fe = 0.3. Dimensions of B: w = 2 μm, Nt = 120, Nm = 200, fc =0.42, and fe = 0.3.
      Si3N4 PCNBC/LNOI37TE0.09-321.6×140
      LN PCNBC/Suspend38TE1.0924-0.75×37
      Si PCNBC/LN39TE1.21.6-1.8×35.5
      LN PCNBC/LNOI36TE1.34-11.51.2×30
      Polymer PCNBC/LNOI32TM0.0738-1.8×118
      Polymer PCNBC/LNOI26TM0.1215-2.1×122
      Polymer PCNBC/LNOIthis work, ATE1.0416.6252×189
      Polymer PCNBC/LNOIthis work, BTE1.872222×223
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    Zhi Jiang, Cizhe Fang, Xu Ran, Yu Gao, Ruiqing Wang, Jianguo Wang, Danyang Yao, Xuetao Gan, Yan Liu, Yue Hao, Genquan Han. Ultra-high-Q photonic crystal nanobeam cavity for etchless lithium niobate on insulator (LNOI) platform[J]. Opto-Electronic Advances, 2025, 8(1): 240114-1

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    Paper Information

    Category: Research Articles

    Received: May. 16, 2024

    Accepted: Aug. 19, 2024

    Published Online: Mar. 24, 2025

    The Author Email: Yao Danyang (DYYao), Gan Xuetao (XTGan)

    DOI:10.29026/oea.2025.240114

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